Capacitor MEMS acceleration sensor

Abstract

The capacitor MEMS acceleration sensor is one sandwich type differential capacitor structure comprising an upper electrode, a middle electrode and a lower electrode, and the movable middle electrode includes one frame with slots, one mass block with one central hole and one cantilever beam. When the mass block moves up and down, the air inside the cavity may pass through the hole and flow out through the slots, and the enhanced air flow can prevent the mass block from moving freely, resulting low damp and less noise.

Description

technical field [0001] The invention relates to an earthquake sensing device, in particular to a capacitive MEMS acceleration sensor. Background technique [0002] Seismometers are commonly used in petroleum seismic exploration. The damping adjustment method is to add a damping ring or adjust the spring stiffness to adjust the spring stiffness, which will affect the sensitivity. Adding a damping ring is an effective method. When the coil moves in the magnetic field, a current is generated. , and the damping ring generates a reverse magnetic field to prevent the coil from moving and play a damping role. [0003] The capacitive MEMS acceleration sensor includes an upper electrode, a lower electrode and a movable middle electrode. The upper electrode and the lower electrode are grooved electrodes formed by micromachining technology. The movable electrode and the upper and lower fixed electrodes form a sandwich structure. After the earthquake, the displacement of the central el...

AI Technical Summary

Problems solved by technology

This greatly increases the cost of the sensor

Images