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Nano super-lattice structured superhard composite film cutting tool and deposition method therefor

A deposition method and superlattice technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., to achieve the effect of good coating quality, wide application value, and improved service life

Inactive Publication Date: 2008-01-23
吴大维
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

There is still a considerable gap between the above-mentioned technologies and practical production

Method used

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  • Nano super-lattice structured superhard composite film cutting tool and deposition method therefor

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Experimental program
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Effect test

Embodiment Construction

[0067] 1. Deposition process of super hard composite film

[0068] ① Tool loading furnace

[0069] The tool 8 is chemically cleaned, and after dehydration and drying, it is installed on the workpiece holder 6. All operations must maintain the cleanliness of the tool 8 and the workpiece holder 6.

[0070] ②Vacuuming and baking of the workpiece

[0071] After the cutter 8 is placed, close the furnace door 5 of the vacuum chamber 4, and pump the vacuum chamber 4 to 3×10 in accordance with the operating rules of the vacuum unit. -3 Pa, then turn on the baking heating power supply, the workpiece speed is 4-6 cycles / min, and the baking temperature is always controlled at 350-400℃. After the baking temperature reaches the standard, it will enter the next step.

[0072] ③Glow ion cleaning

[0073] Blow in argon (Ar) gas, control the air pressure to 2Pa, turn on the pulse bias power supply, slowly increase the voltage to 1200V, the duty cycle is 80%, the speed of cutter 8 is the same as ab...

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Abstract

The present invention is super hard composite film in nanometer superlattice structure for cutter and its depositing process, and especially relates to the setting and components of the work targets. Inside the vacuum chamber, there are inner target, middle target and outer target. The depositing process includes the steps of depositing the transition layer, depositing the super hard film TiAlN / TiAlYN / TiAlN / CrN in nanometer superlattice structure, and depositing the surface self-lubricating film. The super hard film in nanometer superlattice structure has high microscopic hardness and high antioxidant performance, greatly higher that of conventional cutter coating. The complete high quality coating forming process combines the adhering transition layer, main antiwear layer and surface self-lubricating layer perfectly and makes the high grade cutter possess long service life.

Description

Technical field [0001] The invention relates to a superhard composite film tool and a deposition method thereof in the technical field of new materials, and specifically relates to target setting and target composition. Background technique [0002] A layer of hard film is coated on the surface of metal cutting tools by vacuum ion plating method, which can greatly increase the service life of the tools, and has become an indispensable process in the manufacture of high-end tools. With the rapid development of modern manufacturing, higher and higher requirements are put forward for tool coatings. The commonly used titanium nitride (TiN), titanium carbide (TiC) and titanium aluminum nitride (TiAlN) can no longer meet the needs. . [0003] At present, new super hard coatings are constantly emerging in the world to be used in metal cutting tool coatings. British P.Eh.Hovsepian et al. used a combination of magnetron sputtering and cathodic arc ion plating to deposit nano-superlattice ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/34C23C14/35
Inventor 吴大维吴越侠
Owner 吴大维
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