Multiple Integrated Tips Scanning Probe Microscope
a scanning probe and integrated technology, applied in scanning probe microscopy, instruments, measurement devices, etc., can solve the problems of inaccessible fundamental phenomena of thin film materials and devices, inability to characterize the effects of dislocation and grain boundaries of thin films, and limited single-tip spms
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[0049]The present disclosure describes various embodiments of a multiple integrated tips scanning probe microscope for the characterization of thin films and devices. The MiT-SPM enables nanoscale atomic imaging, as well as electrical probing of trans-conductance, in ambient air without requiring a scanning electron microscope. The device provides for detailed studies of transport mechanisms in thin film materials and devices.
[0050]Referring now to the drawings, wherein like reference numerals refer to like parts throughout, there is seen in FIG. 1, in one embodiment, a multiple integrated tip scanning probe microscope system 10. The MiT-SPM system includes the MiT probe 12, which can be wire-bonded to a printed circuit board (PCB) 30. The MiT-SPM also includes a scanning probe head 14, which houses the transduction electronics including the transimpedance amplifier (TIA) which converts the tunneling current into voltage, as discussed in greater detail below. A rotating stage 16 ali...
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