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Arrangement and method for cooling a plasma-based radiation source

a radiation source and arrangement method technology, applied in the direction of instruments, x-ray tubes, wave/particle radiation, etc., can solve the problems of large loss of energy used in waste heat, no details are given as to how to correct the temperature of the liquid metal bath, etc., to prevent solidification of metal coolant, prolong downtime, and high cooling efficiency

Active Publication Date: 2015-04-23
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The invention is about a new way to cool a plasma-based radiation source using a metal coolant that can maintain a constant temperature even when heat input is very hot or very low. The method uses a second cooling circuit, which is controlled to prevent solidification of the metal coolant and is able to handle the sharp variation of heat input during standby and continuous operation. This allows for efficient cooling of the radiation source during different operating phases and ensures a steady supply of cooling liquid.

Problems solved by technology

The majority of the energy that is used is lost in the form of waste heat.
However, no details are given as to how to correct the temperature of the liquid metal bath in a suitable manner to ensure trouble-free functioning during continuous operation as well as during process-related interruptions in radiation.

Method used

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  • Arrangement and method for cooling a plasma-based radiation source
  • Arrangement and method for cooling a plasma-based radiation source
  • Arrangement and method for cooling a plasma-based radiation source

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Embodiment Construction

[0047]As is shown schematically in FIG. 1, a basic variant of the invention includes a revolving element 1 which is to be cooled and which takes part in a plasma generation in a plasma-based radiation source (not shown), and a first vessel 2 with a metal coolant 3 in which the revolving element 1 is partially immersed. As a result of the revolving motion of revolving element 1, the latter is coated with the metal coolant 3 and waste heat absorbed during plasma generation is simultaneously transmitted into the metal coolant 3 on the one hand and a circulating motion is generated within the first vessel 2 on the other hand. In order to maintain the temperature of the metal coolant 3 substantially constant during the plasma generation taking place at revolving element 1 and to ensure a sufficient cooling of the revolving element 1, at least one cooling section 21 is provided on the outer side of the first vessel 2. At a long vessel wall 23, along the inner side of which the metal coola...

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PUM

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Abstract

An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.

Description

RELATED APPLICATIONS[0001]This application claims priority to German Patent Application No. DE 10 2013 017 655.7, filed Oct. 18, 2013, which is incorporated herein by reference in its entirety.FIELD OF THE INVENTION[0002]The invention is directed to an arrangement and a method for cooling a plasma-based radiation source having a revolving element which is to be cooled and which takes part in the plasma generation, and with a primary cooling circuit having a vessel which contains a metal coolant and in which the revolving element is at least partially immersed, means for circulating the metal coolant in the vessel, and a heater for correcting the temperature of the metal coolant to an operating temperature above the melting temperature thereof, particularly for application in EUV radiation sources for semiconductor lithography.BACKGROUND OF THE INVENTION[0003]Extreme ultraviolet (EUV) radiation with wavelengths of λ<50 nm which is needed, particularly at wavelengths λ≦13.5 nm, for...

Claims

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Application Information

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IPC IPC(8): H01J7/24H01J37/32H05G2/00
CPCH01J7/24H01J2237/002H01J37/32798H05G2/008H01J37/32522H05G2/005
Inventor NIIMI, GOTAVAUDREVANGE, DOMINIK MARCELCONRADS, RALF GORDONKOLE, MAGHIEL JANVAN NUNSPEET, WILHELMUS V. J.CUIJPERS, JOHANNES W. J. L.PRINZ, ANDRE MATTHIAS
Owner USHIO DENKI KK
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