Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
a technology of movable bodies and drive systems, applied in the direction of photomechanical devices, instruments, printing, etc., can solve the problems of inferior long-term stability of conventional encoders, lack of measurement value linearity of encoders, and inability to accurately measure the distance between the measurement value and the laser interferometer, etc., to achieve good precision and good precision
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[0111] Hereinafter, an embodiment of the present invention will be described, referring to FIGS. 1 to 40.
[0112]FIG. 1 shows a schematic configuration of an exposure apparatus 100 related to the embodiment.
[0113] Exposure apparatus 100 is a scanning exposure apparatus of the step-and-scan method, namely the so-called scanner. As it will be described later, a projection optical system PL is arranged in the embodiment, and in the description below, a direction parallel to an optical axis AX of projection optical system PL will be described as the Z-axis direction, a direction within a plane orthogonal to the Z-axis direction in which a reticle and a wafer are relatively scanned will be described as the Y-axis direction, a direction orthogonal to the Z-axis and the Y-axis will be described as the X-axis direction, and rotational (inclination) directions around the X-axis, the Y-axis, and the Z-axis will be described as θx, θy, and θz directions, respectively.
[0114] Exposure apparatus...
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