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Exhaust gas treatment apparatus

A kind of exhaust gas treatment equipment and exhaust gas technology, which is applied in the direction of dispersed particle separation, chemical instruments and methods, combined devices, etc., to achieve the effect of reducing cost and reducing surface energy

Inactive Publication Date: 2007-07-04
TAIWAN SEMICON MFG CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] In order to solve the above and other problems, and to achieve the technical advantages claimed by the present invention, the present invention provides an exhaust gas treatment equipment combining a washing device and a filtering device, so as to improve the performance of the existing exhaust gas treatment equipment

Method used

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Embodiment Construction

[0065] In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure, characteristics and effects of the exhaust gas treatment equipment proposed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. Details are as follows.

[0066] Please refer to FIG. 2 , which shows a waste gas treatment device 200 according to a preferred embodiment of the present invention. The waste gas treatment device 200 is connected to a waste gas source 300, and the waste gas treatment device 200 is composed of a filter device 210, The humidifying liquid supply device 220 , the droplet collecting tank 230 and the gas pumping device 240 are combined.

[0067] The filter device 210 has a filter material with low pressure loss; the filter material can be a fiber filter, a non-woven filter or a woven filter.

[0068...

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Abstract

The present invention is an exhaust-processing equipment which including a filter means, the filter with a filter device; A supply of humidification means to provide a humidifier attached to the filtration means that filter; And a gas pumping plant, the gas pumping installations in the filter before or after to pumping gas that to be filtrated or to be disposed through the filter. This equipment can dispose the exhaust gas that mixed with a droplet / particle and gaseous pollutant, the filtering means include a humidification means and a filter screen, by spraying humidification means containing surfactant solution to the filter screen, the solution can reduce the water surface and increase electrostatic attraction of the filter screen, thereby enhancing filter screen filtering effect for the exhaust gas that is less than one micron droplet / particle contaminants.

Description

technical field [0001] The present invention relates to a waste gas treatment device, and in particular to a device for treating liquid droplet / particulate waste gas. More specifically, the present invention relates to an exhaust gas treatment device for treating mixed liquid droplets / particles and gaseous pollutants. Background technique [0002] Today's high-tech industry clusters are becoming more and more dense, and the resulting air pollution problems are also very special: the concentration of exhaust gas emitted by some manufacturing processes is low, but the total amount of emissions is very high. Therefore, the Environmental Protection Agency announced the "Air Pollution Control and Emission Standards for Semiconductor Manufacturing Industry" as the basis for relevant air pollution prevention and control. [0003] In the current manufacturing process of semiconductor components and optoelectronic components, various waste gases are usually produced, among which org...

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Application Information

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IPC IPC(8): B01D50/00
Inventor 黄伟裕洪煜堃刘享星古义榔简弘民吴信贤黄俊超
Owner TAIWAN SEMICON MFG CO LTD
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