Charge restraining method and apparatus for piezoelectric oxide single crystal

A single crystal and oxide technology, applied in chemical instruments and methods, vanadium oxide, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve problems such as electrode damage, electrode short circuit, etc., achieve reliability improvement, and suppress modulation , Improve the effect of vacuum

Inactive Publication Date: 2010-05-12
YAMAJIYU CERAMICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, there is a risk that the electrodes formed on the piezoelectric substrate may be short-circuited by static electricity
In addition, fine metal powder, dust, dirt, etc. generated during the processing steps are electrostatically attracted to the surface of the piezoelectric substrate to short-circuit the electrodes, and there is a risk of damaging the electrodes in an exposed state

Method used

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  • Charge restraining method and apparatus for piezoelectric oxide single crystal
  • Charge restraining method and apparatus for piezoelectric oxide single crystal
  • Charge restraining method and apparatus for piezoelectric oxide single crystal

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Experimental program
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no. 1 approach

[0050] First, the configuration of the charge suppression device in this embodiment will be described. in figure 1 In the figure, a schematic diagram of the charge suppression device is shown. and, figure 2 Using the model in the middle shows how to place the wafer in the processing container. Such as figure 1 As shown, the charge suppression device 1 includes a processing container 2, a heater 3, and a vacuum pump 4.

[0051] The processing container 2 is made of quartz glass. One of the opposite ends of the processing container 2 is connected to a pipe. Through the connecting pipe, the processing container 2 is evacuated. In the processing container 2, a wafer 50 and lithium chloride powder 60 are contained.

[0052] The wafer 50 is supported by a quartz wafer cassette 51. The wafer 50 is composed of a 42° Y-X cut lithium tantalate single crystal. The diameter of the wafer 50 is 4 inches (about 10.16 cm) and the thickness is 0.5 mm. The wafer 50 is placed in an amount of ...

no. 2 approach

[0061] The second embodiment is different from the first embodiment in that the type and placement of the reducing agent are changed. Since the other configuration is the same as the first embodiment, the difference will be described here.

[0062] image 3 Here, a model is used to explain how to place the wafer and the reducing agent in this embodiment. image 3 In, and figure 2 Corresponding components in are marked with the same reference numbers. Such as image 3 As shown, two opposite surfaces of the wafer 50 are coated with a lithium carbonate solution 62. The solution 62 is to dissolve 100 g of lithium carbonate powder into polyvinyl alcohol. In the present invention, the lithium carbonate solution 62 is a reducing agent. By immersing the wafer 50 in a lithium carbonate solution 62, applying the lithium carbonate solution 62 to the surface of the wafer 50, coating the wafer 50 is performed, and then they are dried in a greenhouse at 200°C. In the processing container 2,...

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Abstract

Disclosed is a process for suppressing the electrostatic charge of a lithium tantalate single crystal or a lithium niobate single crystal without deteriorating the piezoelectricity thereof. Also disclosed is an apparatus for easily performing such a process. It is characterized in that a wafer 50, made from a lithium tantalate single crystal or a lithium niobate single crystal, and a reducing agent 60, including an alkali metal or an alkali metal compound, are accommodated in a processing tank 2, and the inside of the processing tank 2 is held at a temperature of from 200 DEG C. or more to less than a Curie temperature of the single crystal under decompression, thereby reducing the wafer 50.

Description

Technical field [0001] The present invention relates to a charge suppression method for piezoelectric oxide single crystals such as piezoelectric substrates for acoustic surface acoustic wave filters, and to charge suppression devices for this purpose. Background technique [0002] Lithium Tantalate (LiTaO 3 ) Single crystal and lithium niobate (LiNbO 3 ) Single crystals are well known as piezoelectric oxide single crystals, and have been used for piezoelectric substrates of surface acoustic wave filters (SAW filters) and the like. In addition, the two single crystals are also used in applied optical products in the form of nonlinear optical crystals, such as optical modulators and wavelength conversion devices, which are the basic components of large-capacity high-speed communication networks. Both single crystals have the characteristics of large thermoelectric coefficient and high impedance. Therefore, a slight temperature change can generate charges on its surface. At the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B29/30C30B33/02C01G31/02C30B33/00
CPCC30B29/30H01L41/253H01L41/1873C30B33/00H10N30/8542H10N30/04C30B33/02
Inventor 堀田和利菅野和也宫川大作仓知雅人笹俣武治佐桥家隆
Owner YAMAJIYU CERAMICS
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