Treating liquid feed device
A technology for supplying devices and processing liquids, which is applied in the fields of cleaning methods using liquids, electrical components, and semiconductor/solid-state device manufacturing. It can solve problems such as leakage, improve processing efficiency, suppress leakage, and reduce processing costs.
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[0033] The processing liquid supply device of the present invention is configured as follows: it is installed in the middle of a transport path for transporting a substrate in a horizontal posture, supplies the processing liquid countercurrently from the upper and lower housings to the front and back of the substrate to the substrate being transported, and performs a predetermined process, and The processed treatment liquid can be recovered through the upper and lower housings, that is, it is an improved device of the treatment liquid recovery type.
[0034] FIG. 1 is an exploded perspective view showing one embodiment of the processing liquid supply device of the present invention, and FIG. 2 is an assembled perspective view. In addition, FIG. 3 is a sectional view taken along line A-A of FIG. 2 . In addition, the front upper wing 251 and the front lower wing 351 are shown enlarged within the circle in FIG. 3 . Incidentally, these figures are all so-called schematic diagrams...
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