Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Symmetric-structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope

A silicon micromechanical and symmetrical structure technology, applied in the field of inertial measurement, can solve the problems of reducing the long-term reliability of the system and increasing the cost of the device, and achieve the effect of easy matching of resonant frequency and high sensitivity

Inactive Publication Date: 2006-10-25
HARBIN INST OF TECH
View PDF0 Cites 14 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, vacuum packaging is usually used, which will increase the cost of the device and reduce the long-term reliability of the system

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Symmetric-structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope
  • Symmetric-structure double-grade decoupling single-crystal-silicon micro mechanical gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0015] Hereinafter, the present invention will be described in more detail with examples in conjunction with the accompanying drawings:

[0016] Combine figure 1 with figure 2 It includes a glass substrate 15, a metal electrode sputtered on the glass substrate, a silicon wafer bonded to the glass substrate through the integral bonding area 1, a driving fixed electrode bonding area 4, a detection fixed electrode bonding area 10, and The structure etched on the silicon chip includes a mass block 14 in the middle, comb drivers symmetrically distributed on both sides of the mass block, comb detectors symmetrically distributed on the other two sides of the mass block, and drive fixed electrodes 3a, 3b is connected with the driving fixed electrode bonding area, the detection fixed electrodes 9a, 9b are connected with the detection fixed electrode bonding area, the driving movable electrode 6 is connected with the driving frame 5, and there is a detection decoupling beam 7 between the d...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a symmetric structure doublestage decoupling single crystal silicon micro mechanic gyroscope that includes glass base sheet, silicon sheet and the structure etched on the silicon sheet. The structure includes mass block, comb type driver and comb type detector. The fixed electrode is connected to bonding area. And the active electrode is connected to the frame. The detecting decoupling beam is set between the driving frame and the mass block. Flexible beam is set between the two ends of the frame. The invention could gain high quality gene under air environment and make the micro mechanic gyroscope have high sensitivity.

Description

(1) Technical field [0001] The invention relates to a micromechanical gyroscope, which belongs to the field of microelectronic mechanical systems and the field of inertial measurement. (2) Background technology [0002] Compared with traditional inertial devices, silicon micromechanical inertial devices have the advantages of small size, low cost, low power consumption, and easy integration with CMOS interface circuits. With the successful application of micromechanical accelerometers in automotive electronic systems, as the main components of micromechanical inertial devices, the research of high-performance micromechanical gyroscopes has received much attention. At present, the following three key points restrict the further improvement of the performance of the micromachined gyroscope. [0003] 1. The matching problem of the resonant frequency of the driving mode of the micromachined gyroscope and the detection mode. Micromechanical gyroscopes mainly have two vertical vibratio...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5684
Inventor 刘晓为陈伟平霍明学谭晓昀陈宏
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com