Differential capacitance type acceleration transducer with frame structure

Abstract

The invention provides a frame structure differential capacity type speed-up sensor. It etches bonding needed table on the back of the silicon sheet; the glass base sheet forms a fixed block with the bonding needed table; it etches an elastic beam, a quality block and fixed and active electrode pictures, wherein the bonding block comprises upper, lower, left, right and inner bonding blocks; the upper and lower bonding blocks are connected with the elastic beam; the frame sharp quality block is between the two elastic beams; the inner side of the left and right bonding blocks and the two sides of the middle bonding block have fixed electrode; the frame sharp quality block has an active electrode which is matched with the fixed electrode. The upper and lower bonding blocks and each bonding block connected with the fixed electrode use the electrostatic bonding to fix it on the glass base sheet.

Description

(1) Technical field [0001] The invention relates to a sensor structure, in particular to a differential capacitive frame structure acceleration sensor which increases the effective capacitance area and eliminates the transverse sensitivity interference. (2) Background technology [0002] Micro-mechanical inertial instruments based on micro-electro-mechanical systems (MEMS) have broad application prospects due to their small size, low cost, and integration with interface circuits. [0003] With the continuous development of acceleration sensors, people have gradually realized that the force balance differential capacitive acceleration sensor has the characteristics of large dynamic range and high test accuracy. The sensor made of the traditional rectangular mass is easy to deform in the non-sensitive direction due to its long length. The width and thickness of the mass will be limited during design, so the quality of the mass is relatively large, which is not conducive to dri...

AI Technical Summary

Problems solved by technology

For example: the left side is used as the capacitor plate 1, and the active electrode forms the capacitor C 1 , the right side is the capacitor plate 2, and the active electrode forms the capacitor C 2 , when working in this way, if there is a lateral acceleration, the two capacitors will have a differential change, that is, one side becomes larger and the other side becomes smaller, so that there will be electrical output at the detection end, and there will be lateral sensitivity interference

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