High-frequency heating device, semiconductor manufacturing device, and light source device

Abstract

The present invention enables miniaturization and life extension while generating microwaves. Setup: an oscillator (1) that generates high frequencies in the microwave band; an amplifier (2) that amplifies the high frequencies generated by the oscillator (1); and an isolator (3) that blocks The reflected wave, the microwave generated by the oscillator (1) is amplified by the amplifier (2), sent to the antenna (5) through the isolator (3), and the microwave sent to the antenna (5) is radiated into the metal cavity (4), The substance is heated by vibrating the water molecules of the substance disposed in the metal cavity (4).

Description

technical field [0001] The present invention relates to a high-frequency heating device, a semiconductor manufacturing device and a light source device, and in particular to a high-frequency heating device, a semiconductor manufacturing device and a light source device suitable for a method for generating microwaves using a solid oscillator. Background technique [0002] In a conventional high-frequency heating device, substances such as food are heated by utilizing the vibration of water molecules when microwaves are irradiated. In addition, in semiconductor manufacturing equipment, plasma is generated by utilizing excitation and ionization of gas when microwaves are irradiated. [0003] Here, in order to generate microwaves, one of vacuum tubes such as a magnetron oscillator (hereinafter, referred to as a magnetron) or a klystron oscillator is widely used in order to efficiently generate a high-frequency output. [0004] When this magnetron is used for example in a heatin...

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Problems solved by technology

[0004] When this magnetron is used for example in a heating device, there are the following problems: due to the intermittent operation of the microwave and the change in the load of the object to be heated, the reflected wave returns to the oscillation tube, and the oscillation frequency fluctuates; the filament is broken. Due to the harmful radiation generated by the magnetron, wireless communication devices such as Bluetooth and WLAN used in the ISM (Industrial Scientific Medical) frequency band cannot communicate due to this interference wave harmful radiation issues, etc.

[0008] However, the solid-state high-frequency oscillators disclosed in Patent Documents 1 and 2 only describe the use of an amplifier composed of transistors to amplify the high-frequency output from the oscillator, but do not disclose a specific method for generating high-frequency frequencies in the microwave band.

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