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Optical acceleration sensor based on Fresnel diffraction micr-lens

An acceleration sensor, Fresnel diffraction technology, applied in the direction of acceleration measurement using inertial force, navigation through speed/acceleration measurement, etc., can solve problems such as complex processing technology

Inactive Publication Date: 2006-03-08
XI AN JIAOTONG UNIV
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This kind of sensor structure is greatly affected by temperature changes, and the processing technology is complicated.

Method used

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  • Optical acceleration sensor based on Fresnel diffraction micr-lens
  • Optical acceleration sensor based on Fresnel diffraction micr-lens
  • Optical acceleration sensor based on Fresnel diffraction micr-lens

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Embodiment Construction

[0019] Such as figure 1 , figure 2 , image 3 , Figure 4 As shown, the main components of the optical acceleration sensor based on the Fresnel diffraction microlens of the present invention are: optical fiber 1, optical fiber end 2 (the optical fiber end 2 is the end of optical fiber 1), glass substrate 3, Fresnel Ear diffraction micro-lens 4, micro-reflective film 5, micro-mass 6, micro-spring 7, frame 8 for fixing spring, shell (not shown in the figure).

[0020] Such as figure 1 As shown, a Fresnel diffraction microlens 4 is processed on the surface of the glass substrate 3 by microfabrication techniques such as sputtering, photolithography, and corrosion, and the odd (or even) half-band of the Fresnel diffraction microlens 4 is plated The last layer of reflective metal film, the even (or odd) bands keep the transparency of the glass; the microreflective film 5 is placed in parallel with the Fresnel diffraction microlens 4 and keeps a small distance (several wavelengt...

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Abstract

This invention discloses optical acceleration sensor based on Fresnel diffraction lens, which contains optical fiber, glass substrate, Fresnel diffraction micro lens, micro reflection film, micro quality block, micro balance spring and casing, wherein the micro reflection film parallel set with Fresnel diffraction micro lens with miniature gap, whose opposite side coated with metal reflection film, another side worked out an acceleration sensitive micro quality block, micro reflection film connected with fixed frame by four plane micro spring, optical fiber fixed the focus point of Fresnel diffraction micro lens for transmitting light, the external acceleration makes micro quality block driving micro reflection film to generate displacement, to change the light strength of focus of Fresnel diffraction micro lens, the acceleration can be tested by testing the change of light strength in optical fiber. Said invention can be used in aircraft control system and other fields demanding high precision sensing and high anti electromagnetic interference.

Description

technical field [0001] The invention belongs to the technical field of optical fiber sensing, and in particular relates to an optical acceleration sensor based on the combination of Micro Electro Mechanical System (MEMS—Micro Electro Mechanical System), Fresnel diffraction microlens and optical fiber technology. Background technique [0002] In the flight control system of the aircraft, inertial navigation is one of the most important navigation methods. Using three orthogonal gyroscopes and three orthogonal acceleration sensors can be integrated into an inertial measurement combination, which can provide information such as the attitude and position of the aircraft. At present, the acceleration sensors actually used in the aviation industry are mostly piezoelectric, electromagnetic and capacitive sensors. These sensors directly obtain electrical signals, and there are problems of weak resistance to electromagnetic interference and electromagnetic shoc...

Claims

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Application Information

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IPC IPC(8): G01P15/03G01C21/16
Inventor 贾书海孔维军杨佳
Owner XI AN JIAOTONG UNIV
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