Light modulating apparatus for quasi-molecular discharge lamp

A technology of excimer discharge lamps and dimming devices, which is applied in the use of gas discharge lamps, electric light sources, lighting devices, etc., can solve the problems of increased stimulated amount and reduced luminous efficiency of 172nm light, and achieve stable dimming effect

Active Publication Date: 2005-03-09
USHIO DENKI KK
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Problems solved by technology

[0009] However, in a device that adjusts the light by changing the lighting voltage applied to the excimer discharge lamp, although the power of the lamp can be increased by increasing the lighting voltage, the intensity of the light emitted by the excimer discharge lamp can be increased. As the lighting voltage increases, the following problem occurs: the luminous efficiency of 172nm light decreases due to the increase in the amount of excitation of an energy level different from the energy level used to emit 172nm excimer light

Method used

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  • Light modulating apparatus for quasi-molecular discharge lamp
  • Light modulating apparatus for quasi-molecular discharge lamp
  • Light modulating apparatus for quasi-molecular discharge lamp

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Embodiment Construction

[0040] The first embodiment of the present invention refers to Figure 1 to Figure 3 Be explained.

[0041] figure 1 It is a diagram showing the configuration of an excimer discharge lamp dimming device according to an embodiment of the present invention. figure 2 yes means figure 1 The diagram of the current waveform and signal waveform of each part of the excimer discharge lamp dimming device shown, image 3 (a) means figure 1 The output voltage waveform of the shown interrupter circuit 4, figure (b) shows figure 1 A graph of the output voltage waveform of the full bridge circuit 5 is shown.

[0042] exist figure 1 Among them, 1 means DC power supply; 2 means commercial power supply; 3 means rectifier; 4 means interrupter circuit; 5 means full bridge circuit; 6 means current detector for detecting lamp current; 7 means transformer; 8 means excimer discharge Light; 9 represents a rectangular wave generating circuit that generates a rectangular wave signal; 10 rep...

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Abstract

To provide an excimer discharge lamp dimmer which enables an excimer discharge lamp to control light stably in a wide range. In the excimer discharge lamp dimmer which controls light by applying a high frequency voltage of a kHz or higher band to the excimer discharge lamp (8) and varying the frequency of the high frequency voltage, an ON-time per half cycle of the frequency is made to be nearly the same as a time for electric-charging contributing to the light emission of the excimer discharge lamp (8), thereby enabling the stable light control. Further, the high frequency voltage applied to the excimer discharge lamp is modulated by a rectangular wave having a lower frequency than that of the high frequency voltage, thereby enabling the light control in a wider range.

Description

technical field [0001] The invention relates to a dimming device for an excimer discharge lamp. Background technique [0002] Conventionally, dimming by changing the lighting voltage or lighting frequency and short-pulse dimming are known as dimming devices for excimer discharge lamps. [0003] As an apparatus for adjusting the light by changing the lighting frequency of the rectangular voltage wave applied to the excimer discharge lamp, for example, the apparatus disclosed in JP-A-2002-216993 is known. [0004] In general, in the high-frequency high voltage applied to the excimer discharge lamp, the intensity of the light emitted by the rectangular wave voltage can be very high, so when the excimer discharge lamp is lit with a rectangular wave voltage, every 1 / 2 cycle The amount of charge required depends on the capacitance between the electrodes of the excimer discharge lamp and the voltage applied to the lamp. For example, in an excimer discharge lamp composed of a disc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B41/392H05B41/28H05B41/38
CPCY02B20/22H05B41/2806Y02B20/00H05B41/38
Inventor 藤原邦彦中村雅规
Owner USHIO DENKI KK
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