Substrate bearing apparatus

Abstract

This invention relates to a base plate load apparatus with at least one base plate, which mainly comprises two side-plates with multiple fixing holes and position holes and at least two separation plates with side-surfaces and sides and multiple parallel ditches, wherein, the multiple parallel ditched formed on each side surface of separation plate to lay the base plate; multiple combination units; multiple fixing bars with bolt holes; at least one base bar with multiple fixing bolts. The base plate load apparatus can strengthen the structure and protect base plate and simplify the size adjusting and it has a good drainage and easy piling.

Description

technical field [0001] The invention relates to a substrate carrying device, especially a cassette device suitable for carrying a large number of substrates when manufacturing liquid crystal display panels. Background technique [0002] At present, in flat panel display (such as liquid crystal display) manufacturing factories, in order to facilitate the handling or storage of the panels and maintain the cleanliness of the substrates, the panels are generally placed in cassettes with neat slots to transport the panels to the next process step , or when the process steps are in progress, the entire batch of panels is sent to a fixed position in the machine, so that the robotic arm of the machine grabs the panels first, and then sends the panels into the process chamber for processing, and some machines even The entire cassette with panels is sent into the processing chamber of the machine, and the whole batch of panels is processed at the same time. [0003] However, the curr...

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Problems solved by technology

[0003] However, the currently used cassettes are shown in Figure 6. Most of the parts of the cassette 600 are connected by screws 610, so that the assembly consumes a large number of screws 610 and is time-consuming. Too many screws are used, and loose inspection and maintenance are difficult, such as the bottom The support rod 620 is locked to the side plate 630 by screws, and it is easy to loosen over time, causing the entire batch of base plates 640 to fall and break

In addition, the groove depth of the spacer plate 650 is designed to be shorter than the transistor circuit terminals on the edge of the substrate 640, so it is easy to scratch the circuit when picking and placing the panel, resulting in a large amount of scrap

Moreover, when the base plate 640 is placed in the old-style cassette 600, it will protrude from the outside of the cassette 600 and lack protection, so that the base plate 640 is easy to collide with foreign objects and break into pieces, and because the panel protrudes, the cassettes cannot be stacked, which takes up a lot of space during storage. Clean room use space

In addition, the design of the drainage hole at the bottom is poor, and water will accumulate after the cleaning process, making it difficult to dry

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