Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation
A double-beam resonator and frequency output technology, applied in the field of micro-electronic mechanical systems, can solve problems such as long response time, large distance between temperature measuring elements and measuring sensors, and difficulty in reflecting the real temperature of the measuring point.
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[0012] Example: see figure 1 , 2, including micro-bridge resonator 1, micro-cantilever temperature-sensitive element 2 and substrate 3, leads 4, amplifiers 8, 11, band-pass filter 9, phase shifter 10, data fusion unit 12 and constant voltage source 13.
[0013] The micro-bridge resonator 1 adopts the working mode of electrothermal excitation / varistor picking up vibration. The middle part of the micro-bridge resonator 1 is made with an excitation resistor 5 to excite the device to vibrate, and the fixed end is made with a piezo-sensitive bridge 6 to pick up the vibration signal; a diagonal of the piezo-sensitive bridge 6 at the root of the micro-bridge resonator 1 passes through The lead 4 is connected to the two input terminals of the differential amplifier 8, the output terminal of the differential amplifier 8 is connected to the input terminal of the band-pass filter 9 through the lead 4, and the output terminal of the band-pass filter 9 is connected to the phase shifter thr...
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