Multi-layer structure unit and its manufacturing method
A multi-layer structure and component technology, which is applied in the direction of multi-layer circuit manufacturing, printed circuit components, semiconductor/solid-state device components, etc., can solve the problem of inability to form high-precision, difficult to fix mother substrates, multi-layer structure components 23 yields low level problem
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[0017] Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0018] As shown in Fig. 1 (g), the multilayer structure part 1 of this embodiment has the mode of forming conductor pattern 3 and insulating layer 4 by cross lamination on the surface side of insulator substrate 2, and the most important feature is that a plurality of insulators At least one of the layers 4 ( 4 a , 4 b , 4 c , 4 d ) is made of an insulating material having a different thermal expansion ratio from the other insulating layers 4 .
[0019] Hereinafter, a specific configuration of the multilayer structure member 1 of this embodiment will be described together with an example of a manufacturing process. For example, first, an insulator substrate 2 as shown in FIG. 1( a ) is prepared. The insulating substrate 2 is made of, for example, an alumina substrate or a glass substrate. On the upper surface of the insulating substrate 2, a conductor pattern 3 (3a) i...
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