MEMS single-axis gyroscope
A single-axis, gyroscopic technology, applied in the field of gyroscopes, can solve problems such as the inability to guarantee the displacement ratio of the mass block and the weak coupling of the mass structure of the gyro, so as to resist the interference of external electrical and mechanical noise, improve the signal-to-noise ratio of the device, and realize the torque balanced effect
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[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0027] like figure 1 As shown in , the MEMS single-axis gyro according to the embodiment of the present invention includes an anchor point unit 1 , a sensing unit 2 elastically connected to the anchor point unit 1 , and a drive decoupling structure elastically connected to the anchor point unit 1 and the sensing unit 2 3; characterized in that,
[0028] The sensing unit 2 includes a plurality of mass blocks 21 arranged side by side, and a rocker connecting piece 22 connected between every two adjacent mass blocks 21; the plurality of mass blocks 21 are arranged symmetrically about the connecting line of the respective centers, Each mass block 21 includes a main body 211 with a receiving groove 212 opened therein, and an elastic structure 213 connected to the main body 211 and located in the receiving groove 212. The end of the elastic structure 213 away ...
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