An arrayable ring-coupled three-axis fully decoupled micro-gyroscope and its processing method

Abstract

The invention discloses an arrayable annular coupling three-axis fully decoupling micro gyroscope and a processing method thereof. Proof-mass sections and corresponding coupled folded beams, etc. Among them, the four mass blocks and the internal structure in the designed four-sided symmetrical structure are completely consistent. Each mass block includes a drive transmission frame, two double-degree-of-freedom frames, two detection frames and corresponding coupling folded beams, and four mass blocks. The drive transmission frame of the block is connected through the coupling of the outer ring and the inner ring to realize equal-amplitude differential drive; the detection frame realizes the full decoupling function through the coupling beam, so as to achieve better measurement performance. The processing technology is simple, and better detection performance can be achieved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical gyroscopes, in particular to a micro-gyroscope capable of array ring coupling and three-axis full decoupling and a processing method thereof. Background technique [0002] Compared with traditional gyroscopes, silicon micromechanical gyroscopes have the advantages of small size, light weight, low cost, high reliability, low power consumption, and mass production, and can be widely used in aviation, automobiles, medical care, photography, and consumer electronics and other fields, has broad application prospects. At present, the most widely used research and application is the single-axis gyroscope, which can only sensitively detect the angular velocity input in one direction, while the three-axis gyroscope can be sensitive to the angular velocity input in three directions at the same time. [0003] In terms of the development of three-axis gyroscopes, a company has already produced commerci...

AI Technical Summary

Problems solved by technology

A company has designed a monolithic integrated three-axis gyroscope product with a structural size of only 3.2×3.2 mm, but it has not achieved complete decoupling of each drive and detection direction, so it is difficult to achieve high performance

A university designed a vibrating ring silicon micro-gyroscope, which can theoretically measure angular velocity in three directions, but its structure and processing technology are complicated, and it is difficult to achieve better performance, so further research is needed to improve

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