A Monolithically Integrated Fully Decoupled Three-Axis Silicon Microgyroscope
A monolithic integration, silicon micro-gyroscope technology, applied in gyroscope/steering sensing equipment, gyroscope effect for speed measurement, instruments, etc., can solve the problems of incomplete decoupling, difficult to achieve performance, complex structure and processing technology, etc. , to achieve good measurement performance, reduce mass processing and production, and reduce mechanical coupling errors
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[0034] The present invention will be further specifically described below in conjunction with the embodiments and the accompanying drawings.
[0035] figure 1 The monolithically integrated fully decoupled three-axis silicon micro gyroscope includes a substrate and a driving part located on the substrate, a driving detection part, a heading angle detection part, a pitch angle detection part, a roll angle detection part, a square large Frame and coupling folded beams; there are four large square frames, which are set opposite to each other and form a square symmetrical structure. The four large square frames are connected as a whole by coupling folded beams, and the coupled folded beams are fixed on the substrate; the driving part has four pieces , respectively connected to the inner edges of the four large square frames, the inner edges refer to the inner sides of the large square frames that are arranged oppositely in pairs; the drive detection part has two pieces that are res...
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