A Monolithically Integrated Fully Decoupled Three-Axis Silicon Microgyroscope

Abstract

The invention discloses a monolithic integrated full-decoupling triaxial silicon microgyroscope which adopts a square symmetric structure and mainly comprises a driving part, a driving detection part, a course angle detection part, a pitching angle detection part, an angle detection part, and corresponding coupling folding beams, wherein structures in four large square frameworks in the designed square symmetric structure are consistent, and the structural forms on two opposite edges are completely the same; the four large frameworks are connected through the coupling folding beams at four opposite angles. The monolithic integrated triaxial silicon microgyroscope disclosed by the invention can be used for simultaneously measuring angular speeds in the course direction, the pitching direction and the transverse rolling direction; furthermore, complete decoupling is realized among all modals through a reasonable structural design, so that high measurement performance is achieved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical gyroscopes, in particular to a single-chip integrated fully decoupled three-axis silicon micro-gyroscope. Background technique [0002] Compared with traditional gyroscopes, silicon micromechanical gyroscopes have the advantages of small size, light weight, low cost, high reliability, low power consumption, and mass production, and can be widely used in aviation, automobiles, medical care, photography, and consumer electronics and other fields, has broad application prospects. At present, the most widely used research and application is the single-axis gyroscope, which can only sensitively detect the angular velocity input in one direction, while the three-axis gyroscope can be sensitive to the angular velocity input in three directions at the same time. [0003] In terms of the development of three-axis gyroscopes, STMicroelectronics, AD, etc. have already released commercial-grade product...

AI Technical Summary

Problems solved by technology

STMicroelectronics has designed a monolithic integrated three-axis gyroscope product with a structural size of only 3.2×3.2 mm, but it does not achieve complete decoupling of each drive and detection direction, so it is difficult to achieve high performance

Cai Nanquan from Cheng Kung University in Taiwan designed a vibrating ring silicon micro-gyroscope, which can theoretically measure angular velocity in three directions, but its structure and processing technology are complex, and it is difficult to achieve better performance, so further research is needed to improve

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