Light-modulated micro-ring resonant cavity and preparation method thereof

Abstract

The invention belongs to the technical field of microelectronic integrated optoelectronic devices, and particularly relates to a light-modulated micro-ring resonant cavity and a preparation method. The phase-change film sequentially comprises a substrate layer, a phase-change material film and a cladding film from bottom to top, a straight bus waveguide and an annular waveguide are carved on the phase change material film by connecting external excitation signals, and the straight bus waveguide and the annular waveguide are coupled through a coupling area. According to the micro-ring resonant cavity provided by the invention, the preparation process is simple, the electrode structure is reduced, and the integration level is improved; the refractive index of the annular waveguide can be changed by exciting the annular waveguide through an optical signal, so that the modulation effect is achieved, and the reconstruction characteristic is achieved.

Description

technical field [0001] The invention belongs to the technical field of microelectronic integrated optoelectronic devices, and more particularly, relates to a light modulation microring resonant cavity and a preparation method. Background technique [0002] Micro-ring resonators are important basic components of integrated optical platforms. Today, structures based on ring resonators have been widely used, such as lasers, add / drop filters, optical modulators, optical switches, dispersion compensators, delay lines, Isolators, optical memories, sensors, mirrors, and optical gyroscopes, etc. The microring resonator is essentially an infinite impulse response filter. It consists of a ring-shaped structure and a straight waveguide. Using the loop of the waveguide to form feedback, it has different periodic responses to light of different wavelengths. It has a simple structure, and can make more new functional devices by cascading micro-ring resonators or combining with other op...

AI Technical Summary

Problems solved by technology

The production process is compatible with the COMS process, and the structure of the microring resonator is produced by steps such as deposition, exposure, development, etching, etc. The resonator structure produced by the existing method is generally a ridge waveguide structure, which cannot be fixed once it is produced. For reconstruction or modification, the precision of the process is very high

And if the microring resonator needs to be modulated, the existing process generally needs to use the thermo-optic effect or electro-optic effect of the production material to make corresponding matching electrodes and apply voltage to modulate, which is relatively complicated.

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