Method for automatically testing fluorine content in fluorine-nitrogen mixed gas

A fluorine-nitrogen mixed gas, automated testing technology, applied in analytical materials, instruments and other directions, can solve the problems of difficult to meet the test, high test cost, complex structure, etc., to achieve the effect of automatic operation, high conversion efficiency and simple device structure

Pending Publication Date: 2022-07-29
浙江博瑞中硝科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the structure of this device is complicated, and the test cost is high, so it is difficult to meet the test of the fluorine content in the fluorine-containing gas with high fluorine content.

Method used

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  • Method for automatically testing fluorine content in fluorine-nitrogen mixed gas
  • Method for automatically testing fluorine content in fluorine-nitrogen mixed gas
  • Method for automatically testing fluorine content in fluorine-nitrogen mixed gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0095] like figure 1 As shown, the test device includes: a gas supply device, a metering device, an adsorption device, and a vacuum device.

[0096] The sample is purchased 20% volF 2 of gas mixture.

[0097] The gas supply device includes a purge gas device and a sample gas supply device.

[0098] The purge gas device is set on the first bypass through the pressure regulating valve RV-801 and the pneumatic valve AV-1, and the pressure regulating valve RV-802 and the pneumatic valve AV-2 of the sample gas supply device are set on the main line.

[0099] The metering device is composed of pressure sensor PI-801 and pneumatic valve AV-4, which is set on the second bypass.

[0100] The adsorption device is composed of adsorption towers AB-1 and AB-2 in parallel, the inlet is set on the second bypass, and the outlet is set on the third bypass.

[0101] The vacuum device is composed of vacuum pump NP-1, pneumatic valve AV-11, buffer tank VP-1; it is connected to the main line t...

Embodiment 2

[0113] The test gas is the configured 15% volF 2 The mixture is the same as in Example 1.

Embodiment 3

[0115] The test gas is the configured 5% volF 2 The mixture is the same as in Example 1.

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PUM

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Abstract

The invention discloses a method for automatically testing the content of fluorine in fluorine-nitrogen mixed gas. The device comprises an air supply device, a metering device, an adsorption device and a vacuum device. The metering device, the adsorption device and the vacuum device are sequentially connected through a pipeline, a hand valve and a flow limiting orifice plate. The measured fluorine-nitrogen mixed gas is introduced into an absorption device for a reaction, the remaining gas is measured after the reaction is finished, the fluorine content in the fluorine-nitrogen mixed gas is tested according to the change of the volume before and after the fluorine-nitrogen mixed gas enters the absorption device, and the result can be directly and automatically calculated. The testing precision is high, and continuous testing can be realized.

Description

technical field [0001] The invention belongs to the technical field of gas analysis, and in particular relates to a method for automatic testing of fluorine content in a fluorine-nitrogen mixed gas. Background technique [0002] Fluorine gas is a very corrosive pale yellow diatomic gas with a strong pungent odor and a strong oxidant. At room temperature, it can combine with almost all elements and generate a large amount of heat energy. [0003] At present, the fluorine gas obtained after electrolysis of anhydrous hydrogen fluoride and purification process is used to prepare fluoride such as uranium hexafluoride, sulfur hexafluoride, boron trifluoride, silver difluoride, cobalt trifluoride and magnesium trifluoride , and can also be used in fields such as laser gas or plastic fluorination. Fluorine-nitrogen mixed gas is a general term for a mixture of fluorine gas and nitrogen gas with a fluorine gas content of less than 20% by volume. It is used in the field of electronic ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N7/04
CPCG01N7/04
Inventor 李金娥付铁柱李军陈刚明博贺辉龙张学良
Owner 浙江博瑞中硝科技有限公司
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