LIBS (Laser-induced Breakdown Spectroscopy) analysis device with automatic focusing and micro-area imaging functions and application

An autofocus and analysis device technology, applied in the field of laser-induced breakdown spectroscopy, can solve the problem of being unable to judge whether the laser target falls on the sample or on the impurity particles

Pending Publication Date: 2022-06-28
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the defect that LIBS instruments in the prior art cannot judge whether the laser target falls on the sample or the impurity particles, the present invention provides a hand-held LIBS analysis device with auto-focus and micro-area imaging functions

Method used

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  • LIBS (Laser-induced Breakdown Spectroscopy) analysis device with automatic focusing and micro-area imaging functions and application
  • LIBS (Laser-induced Breakdown Spectroscopy) analysis device with automatic focusing and micro-area imaging functions and application
  • LIBS (Laser-induced Breakdown Spectroscopy) analysis device with automatic focusing and micro-area imaging functions and application

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Embodiment 1

[0036] like Figure 1-4 As shown, the present embodiment provides a handheld LIBS analysis device with auto-focusing and micro-region imaging functions, which includes a device main body, the device main body includes a mounting seat 110, and the mounting seat 110 is provided with a pulsed laser 120, an optical path module and The autofocus module, the optical path module includes a first installation box 140a, a second installation box 140b and a third installation box 140c arranged in sequence from bottom to top, the first installation box 140a, the second installation box 140b and the third installation box 140c A perforated total reflection mirror 320a, a beam splitter 320b and a total reflection mirror 320c are respectively provided, and the autofocus module and the pulsed laser 120 are respectively arranged on both sides of the first installation box 140a and are oppositely arranged in the same horizontal plane, The optical fiber coupler 160 is connected to the side of t...

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Abstract

The invention relates to the technical field of laser-induced breakdown spectroscopy, and discloses an LIBS (laser-induced breakdown spectroscopy) analysis device with automatic focusing and micro-area imaging functions and application. The device body comprises a mounting base, a pulse laser, a light path module and an automatic focusing module are arranged on the mounting base, the light path module comprises a first mounting box, a second mounting box and a third mounting box, and a punching total reflective mirror, a beam splitter and a total reflective mirror are arranged in the first mounting box, the second mounting box and the third mounting box respectively. The automatic focusing module and the pulse laser are arranged on the two sides of the first installation box respectively, an optical fiber coupler is connected to the side face of the second installation box, a camera is connected to the side face of the third installation box, and a processing module connected with the optical fiber coupler and the camera is further arranged on the installation base. Through the arrangement, the position of the laser target spot of the LIBS instrument can be observed when a sample is detected, so that whether the laser target spot falls on the sample or impurity particles or not is judged, and the use is relatively convenient.

Description

technical field [0001] The invention relates to the technical field of laser-induced breakdown spectroscopy, in particular to a handheld LIBS analysis device with auto-focusing and micro-area imaging functions and its application. Background technique [0002] LIBS is the abbreviation of Laser-Induced Breakdown Spectroscopy (Laser-Induced Breakdown Spectroscopy). Its working principle is to use a pulsed laser to focus on the sample to induce the atomic emission spectrum of the sample to generate plasma, and to extract the atomic emission spectrum through a spectrometer. Identifying the elemental composition in a sample is a technique for the identification, classification, qualitative and quantitative analysis of materials. [0003] With the continuous development of lasers and high-resolution spectrometers, the size and cost of instrument. Retaining the advantages of LIBS technology and focusing on in situ and online analysis, it is especially suitable for field environme...

Claims

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Application Information

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IPC IPC(8): G01N21/71G01N21/01
CPCG01N21/718G01N21/01G01N2021/0112
Inventor 张志荣张梦阳付洪波王华东吴边
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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