Vacuum type three-dimensional scanning laser surface cleaning and collecting device

Abstract

The invention relates to a vacuum type three-dimensional scanning laser surface cleaning and collecting device. The three-dimensional scanning laser is placed outside the vacuum target, so that the complex design required by a movable target table and a movable laser is simplified, and the economic cost of the device is reduced. A to-be-cleaned sample and a collecting device are placed in the vacuum target chamber, so that a cleaned target is prevented from escaping into the environment to pollute the environment, meanwhile, the vacuum chamber plays a role in radiation protection, the device is particularly suitable for cleaning and collecting highly toxic samples and radiation samples, and the cleanness of the surface of the cleaned sample is well protected. And the sample mounting table and the plasma absorption target cylinder are connected to suppress potential, so that escape of the plasma is effectively prevented, and the collection efficiency of the plasma is improved. Due to the unique optical path structure, when the optical mechanism moves and scans, the total optical path can be automatically compensated for in an experiment, and a laser focusing light spot can be self-locked on a sample target surface.

Description

technical field [0001] The invention relates to a laser surface cleaning and collecting device, in particular to a vacuum-type three-dimensional scanning laser surface cleaning and collecting device. Background technique [0002] As a mature technology, laser surface cleaning has been widely used in the industrial field. It has the characteristics of no grinding, non-contact, no thermal effect and suitable for cleaning of various materials. Laser cleaning can solve problems that cannot be solved by traditional cleaning methods. Its working principle is that the laser beam is focused on the solid surface, and the plasma is formed after the surface absorbs the energy of the high-power-density laser, and the plasma shock wave further impacts the surrounding impurity particles to make them peel off. In the application process, short-pulse laser is generally used, which can effectively avoid thermal damage to the inner surface of the solid. [0003] Laser surface cleaning needs ...

AI Technical Summary

Problems solved by technology

Environmental and equipment contamination when cleaning and collecting toxic and radioactive surfaces

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