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Device and method for measuring nonlinear electromechanical impedance spectroscopy of piezoelectric device

A technology of electromechanical impedance and piezoelectric devices, which is applied in the direction of material resistance to achieve accurate measurement

Pending Publication Date: 2022-04-08
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In fact, the nonlinear electromechanical impedance spectrum of piezoelectric devices can well reflect various nonlinear characteristics of piezoelectric devices, but existing instruments cannot complete the measurement of nonlinear electromechanical impedance spectra of piezoelectric devices

Method used

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  • Device and method for measuring nonlinear electromechanical impedance spectroscopy of piezoelectric device
  • Device and method for measuring nonlinear electromechanical impedance spectroscopy of piezoelectric device
  • Device and method for measuring nonlinear electromechanical impedance spectroscopy of piezoelectric device

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Embodiment Construction

[0040] The present invention will be further elaborated below through specific embodiments in conjunction with the accompanying drawings.

[0041] Such as figure 1 As shown, the measuring device of the nonlinear electromechanical impedance spectrum of the piezoelectric device of the present embodiment includes: a sampling resistor 2, a parallel resistor 3, a first electromagnetic relay 4, a parallel capacitor 5, a second electromagnetic relay 6, a function generator 7, a voltage Amplifier 8, a first digital multimeter 9, a second digital multimeter 10 and a computer 11; wherein, the measured piezoelectric device 1 is connected in series with the sampling resistor 2, and the resistance value of the sampling resistor 2 is much smaller than that of the measured piezoelectric device 1 in the measurement frequency range The minimum impedance value within; the parallel resistor 3 is connected in series with the first electromagnetic relay 4 and then connected in parallel with the me...

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Abstract

The invention discloses a piezoelectric device nonlinear electromechanical impedance spectrum measuring device and a measuring method thereof. A tested piezoelectric device is connected with a sampling resistor in series, a first electromagnetic relay and a second electromagnetic relay respectively control a parallel resistor and a parallel capacitor to be connected to the tested piezoelectric device in parallel, a function generator generates a sinusoidal voltage signal, and the sinusoidal voltage signal is applied to a circuit after being amplified by a voltage amplifier. A first digital multimeter and a second digital multimeter are used for respectively measuring voltages generated by voltage amplifiers which are only connected in series with a sampling resistor circuit, connected in parallel with a parallel resistor circuit and connected in parallel with a parallel capacitor circuit and voltages at two ends of a sampling resistor, and a real part and an imaginary part of admittance of the tested piezoelectric device are calculated; when the applied voltage is small, the device is equivalent to an impedance analyzer, and the linear electromechanical impedance spectrum of the piezoelectric device can be conveniently measured; when the applied voltage is large, the nonlinear electromechanical impedance spectrum of the piezoelectric device can be accurately measured, which cannot be achieved by any other device at present.

Description

technical field [0001] The invention relates to a performance measurement technology of a piezoelectric device, in particular to a measurement device and a measurement method for a nonlinear electromechanical impedance spectrum of a piezoelectric device. Background technique [0002] Piezoelectric devices are widely used in high-power ultrasonic fields including: ultrasonic cleaning, ultrasonic welding and ultrasonic cutting. According to international standards, the characteristic parameters of piezoelectric devices, including impedance, capacitance, resonance frequency and quality factor, etc., are determined by measuring their linear electromechanical impedance spectrum, and these parameters are generally considered to be constant, that is, they do not vary with the applied Varies with changes in the magnitude of the voltage. Linear electromechanical impedance spectroscopy can be easily measured with a commercial impedance analyzer, and the voltage applied during the mea...

Claims

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Application Information

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IPC IPC(8): G01N27/04
Inventor 李法新谢明宇唐骥骅
Owner PEKING UNIV
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