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Device and method for measuring overall three-dimensional profile of inner surface of concave workpiece

A technology of three-dimensional contour and measuring device, applied in the field of contour measurement, can solve the problems of complex system structure and insufficient adaptability of single probe angle, and achieve the effect of avoiding speckle phenomenon

Active Publication Date: 2022-04-08
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, which effectively solves the problems of insufficient adaptability of the original single probe angle and complex system structure.

Method used

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  • Device and method for measuring overall three-dimensional profile of inner surface of concave workpiece
  • Device and method for measuring overall three-dimensional profile of inner surface of concave workpiece
  • Device and method for measuring overall three-dimensional profile of inner surface of concave workpiece

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Embodiment 1

[0041] A device for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, such as figure 1 shown, including:

[0042] The light generation module is used to simultaneously generate ring light and collimated light, and the transmission direction of the ring light is perpendicular to the central axis of symmetry of the tested sample 11, and the transmission direction of the collimated light is parallel to the central axis of symmetry of the tested sample 11 . Through this setting, the central axis of the light generating module (which is also the center of the ring light) and the symmetric central axis of the sample 11 under test can only be parallel but not coaxial, that is, the circular error caused by the off-axis of the ring light will not be caused (from a perfect circle to an ellipse), avoiding the problem that the system needs to add a coaxial adjustment mechanism when the ring light is obliquely incident (when the angle between the...

Embodiment 2

[0064] This embodiment provides a method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, which is applied to the device for measuring the overall three-dimensional profile of the inner surface of a concave workpiece as provided in Embodiment 1, including the following steps:

[0065] Obtain the first reflected light set;

[0066] Obtain a second reflected light set;

[0067] Obtaining the contour of the side surface of the concave space according to the first reflected light set and the annular light section method;

[0068] The contour of the inner bottom surface is obtained according to the second reflected light set and the laser triangulation ranging method.

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Abstract

The invention discloses a device and a method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece, and the device comprises a light generation module which is used for generating annular light and collimated light at the same time, the transmission direction of the annular light is perpendicular to the symmetric center axis of a measured sample piece, and the transmission direction of the collimated light is parallel to the symmetric center axis of the measured sample piece; the first reflected light detection module is used for receiving the first reflected light and generating a first object image; the second reflected light detection module is used for receiving the second reflected light and generating a second object image; and the control processing module is used for acquiring the side contour of the inner concave space according to the first reflected light set and acquiring the inner bottom contour according to the second reflected light set. The invention aims to provide the device and the method for measuring the overall three-dimensional profile of the inner surface of the concave workpiece, and effectively solve the problems of insufficient angle adaptability, complex system structure and the like of various original single probes.

Description

technical field [0001] The invention relates to the technical field of profile measurement, in particular to a device and method for measuring the overall three-dimensional profile of the inner surface of a concave workpiece. Background technique [0002] With the continuous advancement of precision machining technology, the surface processing quality of samples of various shapes is continuously improved, and higher and higher requirements are placed on surface profile detection technology. Profile measurement methods can be divided into two categories: contact and non-contact. Among them, non-contact measurement is favored due to its non-destructive properties on the surface of the measured sample, including interferometry, laser triangulation, and confocal methods. Among them, the interferometry measurement accuracy is extremely high, but the system structure is complex and has very high requirements for environmental stability; the confocal method and the laser triangula...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 马骅张霖柴立群白金玺任寰石振东马可刘丽佳
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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