Method and system for precisely engraving transparent material through frequency-locking single-pulse green ultrafast laser

An ultra-fast laser and transparent material technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problem of material strength weakening, and achieve fast processing time, accurate timing matching, and good consistency

Pending Publication Date: 2022-04-05
北京赢圣科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

After multiple bursts of irradiation, the irradiated part is further darkened, and finally forms a blackened edge around it, and the strength of the material becomes weaker

Method used

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  • Method and system for precisely engraving transparent material through frequency-locking single-pulse green ultrafast laser
  • Method and system for precisely engraving transparent material through frequency-locking single-pulse green ultrafast laser
  • Method and system for precisely engraving transparent material through frequency-locking single-pulse green ultrafast laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0075] Example 1: Precise engraving of "lizard" pattern on glass surface

[0076] The laser is connected to the computer installed with the laser engraving system software through the data line, and the computer inputs the controlled laser power, scanning speed, and repetition frequency signals to the laser, and the laser is an all-solid-state picosecond laser. The controller receives the pulse synchronization signal of the laser, and at the same time controls the optical path, vibrating mirror, field mirror and six-axis motion system to complete the engraving.

[0077] The locked emission frequency is 50KHz; the single pulse energy is 50uJ. The single pulse width is 10ps.

[0078] The laser window spot is 2mm, and the divergence angle is 1.0mrad.

[0079] The shaping optical path is a beam expanding optical path with a magnification of 5 times.

[0080] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 500mm.

[...

Embodiment 2

[0089] Example 2: Precise engraving of the "three-dimensional floor plan" pattern inside the glass

[0090] Basically the same as Example 1, the difference is that,

[0091] The locking emission frequency is 10KHz; the single pulse energy is 1000uJ. The single pulse width is 1ps.

[0092] The laser window spot size is 3mm, and the divergence angle is 1.5mrad.

[0093] The shaping optical path is a beam expanding optical path with a magnification of 8 times.

[0094] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 1000mm.

[0095] The working frequency of the vibrating mirror is 50k, and the lens size of the vibrating mirror is 30mm.

[0096] The field lens is an F-θ field lens with a focal length of 300mm.

[0097] The minimum resolution feature size for forming the engraved pattern microstructure is 1um.

[0098] Engraving effect such as image 3 shown.

Embodiment 3

[0099] Example 3: "Pentagram" hole engraving on glass

[0100] Basically the same as Example 1, the difference is that,

[0101] The locking emission frequency is 200KHz; the single pulse energy is 300uJ. The single pulse width is 10ps.

[0102] The laser window spot size is 1mm, and the divergence angle is 0.5mrad.

[0103] The shaping optical path is a beam expanding optical path with a magnification of 1 times.

[0104] The beam transmission optical path is composed of a transmission optical path with a transmission distance of 100mm.

[0105] The working frequency of the vibrating mirror is 200k, and the lens size of the vibrating mirror is 5mm.

[0106] The field lens is a telecentric field lens with a focal length of 30mm.

[0107] The minimum resolution feature size for forming the engraved pattern microstructure is 4um.

[0108] Engraving effect such as Figure 4 As shown, the notch is neat and there are no cracks.

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Abstract

The invention provides a method and a system for precisely engraving a transparent material by frequency-locking monopulse green ultrafast laser, the method comprises the following steps: 1) arranging an ultrafast laser which can emit high-energy monopulse at high repetition frequency and has high monopulse energy consistency, the frequency is 10KHz-200KHz, and the monopulse energy is 50uJ-1000uJ; 2) locking the transmitting frequency as a fixed value; (3) the laser wavelength is set to be 532 + / -5 nm; 4) inputting the ultrafast laser into a galvanometer through a shaping light path and a light beam transmission light path, and focusing the surface or the interior of the transparent material after passing through a field lens; according to the engraving method, engraving is achieved through an ultrafast laser vaporization material machining face with high monopulse energy, almost no heat affected zone appears, materials such as auxiliary powder are not needed, the marked content is fine and clear, and the strength of a base material is not changed.

Description

technical field [0001] The invention relates to the technical field of laser engraving, in particular to a method and system for precise engraving of transparent materials with a frequency-locked uniform energy single-pulse green light ultrafast laser. Background technique [0002] Laser engraving technology can be used to mark transparent materials (such as glass, sapphire, etc.), and is widely used in many fields such as consumer electronics, automobiles, aerospace, construction, and home life. Therefore, the market demand is broad and the development potential needs to be tapped. [0003] At present, laser engraving technology for transparent materials mainly uses CO2 lasers, green nanosecond lasers, ultraviolet nanosecond lasers or engraving machines based on ultrafast fiber lasers to achieve engraving by destroying the surface of transparent materials. The principle of this type of engraving method is heat to melting, and the appearance of the heat-affected zone will ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/046B23K26/064B23K26/362B23K26/402
Inventor 不公告发明人
Owner 北京赢圣科技有限公司
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