Interferometer based on continuous rotation and working method thereof
A technology of interferometer and rotating arm, which is applied in the field of interferometer, can solve the problems of low transmittance and low overall transmittance, and achieve the effect of fast scanning speed, improved signal-to-noise ratio, and increased luminous flux
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Embodiment 1
[0027] figure 1 A schematic structural diagram of an interferometer based on continuous rotation according to an embodiment of the present invention is given, as figure 1 As shown, the interferometer based on continuous rotation includes:
[0028] A first light source 11, a first mirror 41 and a first detector 31, the first light source 11 is used to emit measurement light;
[0029] The first reflector 21 and the second reflector 22, the first reflector 21 and the second reflector 22 are arranged symmetrically about the first lens 41, the first reflector 21 is used to reflect the measurement The transmitted light of the light passing through the first mirror 41, the second mirror 22 is used to reflect the reflected light of the measurement light on the first mirror 41;
[0030] The first reflection unit, the first reflection unit includes:
[0031] a first rotating arm 51 and a driving unit, the first rotating arm 51 is driven to rotate around a rotating shaft by the drivin...
Embodiment 2
[0049] An application example of the continuous rotation-based interferometer and its working method according to Embodiment 1 of the present invention.
[0050] In this application example, if figure 1 As shown, the third-sixth reflectors on the first rotating arm 51 are corner reflectors, and the second light source 12 is a laser.
[0051] According to the working method based on the continuously rotating interferometer according to the embodiment of the present invention, the working method is:
[0052] The drive unit drives the first rotating arm 51 to continuously rotate in one direction such as counterclockwise, the third reflector 23 and the fourth reflector 24 follow the rotation of the first rotating arm 51, and at the same time, the first light source 11 emits a measurement light, the second light source 12 emits reference light;
[0053] The third reflector 23 and the fourth reflector 24 periodically rotate to the first working position. At this time, the reflecte...
Embodiment 3
[0059] The application example of the interferometer based on continuous rotation and its working method according to Embodiment 1 of the present invention is different from Embodiment 2 in that:
[0060] A second reflection unit is also provided. The second reflection unit is the same as the first reflection unit and shares a rotation axis. The angle between the first rotating arm and the second rotating arm is 90 degrees, which further improves the scanning speed.
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