Large-area patterned micro-nano particle self-assembly structure and preparation method thereof
A micro-nano particle and patterning technology, applied in the directions of micro-structure technology, micro-structure device, manufacturing micro-structure device, etc., can solve the problem that the preparation method of patterned micro-nano particles needs to be improved, complicated, and the pulling/convective self-assembly is slow to prepare. speed etc.
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[0053] Step 1: Add the colloidal dispersion liquid containing 900nm silicon dioxide hydrophobic nanoparticles into the liquid pool containing deionized water dropwise. Single-layer micro-nanoparticle film with closely arranged area;
[0054] Step 2: Prepare a template with a striped pattern using microimprinting technology, in which the width of the striped protrusions is 6 μm, and the interval between two adjacent stripes is 14 μm, and then the silicon dioxide hydrophobic nanoparticle film obtained in step 1 is transferred to On a template with a striped pattern (such as figure 2 shown);
[0055] Step 3: Utilize the modified silane polymer to prepare an adhesion layer (such as image 3 shown), and then the surface is covered with a striped pattern of silicon dioxide hydrophobic nanoparticle film and pressed against the surface of the silicon wafer containing the adhesive layer (such as Figure 4 shown);
[0056] Step 4: Use oxygen reactive ion etching to remove the adhes...
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