Silicon wafer detection device and detection method

A detection device and detection method technology, which is applied in the field of optical detection, can solve problems such as affecting test accuracy, poor test accuracy, and difficulty in meeting industry needs, and achieve the effect of improving detection accuracy, meeting industry needs, and accurate distance

Pending Publication Date: 2022-01-18
上海德瀛睿创半导体科技有限公司
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Problems solved by technology

[0003] However, in the test method of laser triangulation, the test spot is small only when the distance of the measured object is at the focal point of laser emission, and the test spot at other distances is larger, which affects the test accuracy
Therefore, the existing method of using laser triangulation to test silicon wafers has poor test accuracy and is difficult to meet the needs of the industry

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  • Silicon wafer detection device and detection method
  • Silicon wafer detection device and detection method
  • Silicon wafer detection device and detection method

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Embodiment Construction

[0040] In order to better understand the technical solutions provided by the embodiments of this specification, the technical solutions of the embodiments of this specification will be described in detail below through the drawings and specific examples. The detailed description of the technical solutions of the embodiments is not a limitation to the technical solutions of this specification. In the case of no conflict, the embodiments of this specification and the technical features in the embodiments can be combined with each other.

[0041] In this document, relational terms such as first and second etc. are used only to distinguish one entity or operation from another without necessarily requiring or implying any such relationship between these entities or operations. Actual relationship or sequence. Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or apparatus...

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Abstract

The invention discloses a silicon wafer detection device and a silicon wafer detection method, relates to the technical field of optical detection, and can improve the testing precision of silicon wafer testing so as to meet industry requirements. The silicon wafer detection device comprises at least two confocal displacement sensors and a sensor mounting rack, wherein at least one of the at least two confocal displacement sensors is used as a front detection sensor, at least one of the at least two confocal displacement sensors is used as a back detection sensor, the front detection sensor and the back detection sensor are oppositely arranged, and a gap between the front detection sensor and the back detection sensor is used for accommodating a silicon wafer to be detected; and the sensor mounting rack is used for mounting the confocal displacement sensors.

Description

technical field [0001] The present application relates to the technical field of optical detection, in particular to a silicon wafer detection device and detection method. Background technique [0002] With the rapid development of the semiconductor and solar energy industries, the requirements for the specifications of silicon wafers as raw materials are becoming more and more stringent. How to quickly and accurately detect the quality parameters of silicon wafers is a great challenge. The quality parameters of silicon wafers usually use the distance The detection method is obtained. At present, the existing distance detection method is to use the laser triangulation method, that is, the reflected light of the measured object at different distances is irradiated to different positions of the linear CCD (charge-coupled device), and the distance of the measured object is detected through the trigonometric function relationship of light propagation. distance and the surface c...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/95G01B11/06
CPCG01N21/01G01N21/9501G01B11/06G01N2021/0112
Inventor 蒲天程明吴正福
Owner 上海德瀛睿创半导体科技有限公司
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