High-precision inspection method for inner wall of wolteri-type X-ray focusing mirror

Abstract

The invention discloses a high-precision detection method for the inner wall of a Wolter I type X-ray focusing mirror, which belongs to the technical field of non-contact detection of the inner wall of the X-ray focusing mirror. Including the following steps: S5. Use laser autocollimator to determine the eccentricity and record of the rotation of the main axis of the lens barrel and the vertical axis; S6. Adjust the X displacement stage, the long-distance interferometric probe and the focusing short-distance interferometric probe to a suitable position , so that it is within the effective working range; S7. Control the high-precision air-floating spindle to drive the long-distance interferometric probe and the focusing short-distance interferometric probe to rotate for one revolution, and measure the roundness of the section here; S8. Move the lifting guide rail and measure as needed Roundness of multiple sections; S9. Adjust the position of the X translation stage in real time, and measure the accuracy of the busbar by controlling the lifting guide rail; S10. Control the rotation of the high-precision air bearing spindle to a certain angle, and measure the accuracy of multiple busbars; S11. Analyze the measurement data to obtain mirror The surface shape accuracy of the inner wall of the cylinder. The invention can realize the profile measurement of the inner wall of the lens in the axial direction and the circumferential direction.

Description

technical field [0001] The invention belongs to the technical field of non-contact detection of the inner wall of an X-ray focusing mirror, and in particular relates to a high-precision detection method for the inner wall of a Wolter I type X-ray focusing mirror. Background technique [0002] In order to study and observe new phenomena of high-energy radiation from celestial bodies such as black holes and neutron stars, observatories and space centers in many countries and regions led by the United States have launched more than ten X-ray astronomical satellites into space. In 1952, German physicist Hans Wolter designed three kinds of Wolter-type X-ray focusing telescopes with grazing incidence satisfying the Abbe sine condition, called Wolter III III focusing telescopes. The Wolter-Ⅰ X-ray telescope is composed of a parabolic internal reflector and a hyperbolic internal reflector. Its advantage is that it can be nested in multiple layers, which is conducive to weak source o...

AI Technical Summary

Problems solved by technology

The integrated detection of the focusing telescope lens is a very critical part of the satellite project. In order to meet the requirements of the working energy area, collection area and angular resolution required by the focusing telescope array index, it is necessary to use #1-45, with a length of 600mm and different diameters. The focusing mirror lens with a maximum diameter of 500mm is assembled together, and the surface roughness requirement is 0.5nm, the surface shape accuracy requirement is 0.2μm, and the thickness of the thinnest lens is only 0.2mm, which is easily deformed. This technical index is It is extremely difficult to realize and complete, so it puts forward higher requirements for the accuracy and stability of the detection system

Since the optical surface is the inner surface of the mirror shell, the existing general-purpose measuring instruments cannot directly detect the surface shape accuracy

Traditional measurement methods have poor accuracy and low efficiency, which cannot meet the needs of fast and high-precision detection. At the same time, it is easy to cause deformation of large-sized ultra-thin lenses, which cannot guarantee non-destructive testing.

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