Hybrid integrated external cavity tunable laser based on lithium niobate photonic waveguide
A technology for tuning lasers and integrating external cavities, applied in semiconductor lasers, optical waveguide semiconductor structures, lasers, etc., can solve the problems of small wavelength tunable range and complex manufacturing process, and achieve large wavelength tunable range and high output power. , the effect of narrow line width
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[0030] This embodiment proposes a hybrid integrated external cavity tunable laser based on lithium niobate photonic waveguide, such as figure 1 As shown, it is a schematic structural diagram of the hybrid integrated external cavity tunable laser based on the lithium niobate photonic waveguide of this embodiment.
[0031] The hybrid integrated external cavity tunable laser proposed in this embodiment based on lithium niobate photonic waveguide includes a reflective semiconductor optical amplifier 1 and a lithium niobate photonic chip. Among them, the lithium niobate photonic chip includes a mode spot converter 2, a phase adjustment module 3, a vernier filter 4, a Bragg reflection grating 5, and an output waveguide 6 connected in sequence; the output terminal of the reflective semiconductor optical amplifier 1 and the mode spot converter The end face coupling of the input end of 2; the vernier filter is covered with a nickel-chromium alloy electrode 402 and a gold electrode 403;...
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