Glass ceramic, chemically strengthened glass, and semiconductor support substrate
A technology of strengthening glass and glass-ceramic, applied in the direction of semiconductor/solid-state device parts, circuits, electrical components, etc., can solve the problem of transparency rarely reaching the level of protective glass, and achieve excellent transparency and strength, chemical strengthening The effect of excellent characteristics and large coefficient of thermal expansion
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[0164] Hereinafter, the present invention will be described by way of examples, but the present invention is not limited thereto.
[0165]
[0166] Glass raw materials were prepared so that the glass compositions in Tables 1-2 by mass % based on oxides were obtained, and it weighed so that 800g of glass could be obtained. Next, the mixed glass raw materials were put into a platinum crucible, put into an electric furnace at 1600° C., and melted for about 5 hours to defoam and homogenize.
[0167] The resulting molten glass was poured into a mold, kept at the glass transition temperature for 1 hour, and then cooled to room temperature at a rate of 0.5° C. / minute to obtain a glass block. The glass transition temperature, thermal expansion coefficient, specific gravity, Young's modulus, refractive index, and Vickers hardness of the amorphous glass were evaluated using a part of the obtained block, and the evaluation results are shown in Tables 1 and 2. Blank columns in the tabl...
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