Two-dimensional large-stroke high-load decoupling deflection device

Abstract

The invention discloses a two-dimensional large-stroke high-load decoupling deflection device, which comprises an amplifying mechanism, a deflection supporting rod, a base and a deflection table, wherein the amplifying mechanism and the deflection supporting rod are arranged on the base, the amplifying mechanism is connected with the deflection supporting rod, and the two ends of the deflection table are connected with the top of the amplifying mechanism and the top of the deflection supporting rod respectively; the amplifying mechanism comprises a first-stage amplifying assembly, a second-stage amplifying assembly and a third-stage amplifying assembly, a placement cavity is formed in the first-stage amplifying assembly, and piezoelectric ceramics are placed in the placement cavity. Equivalent bidirectional displacement is applied to the first-stage amplifying assembly through the piezoelectric ceramics in the placement cavity, the first-stage amplifying assembly amplifies the input displacement of the piezoelectric ceramics to generate transverse displacement in the opposite direction, and the transverse displacement acts on the second-stage amplifying assembly. The second-stage amplifying assembly converts transverse displacement of the first-stage amplifying assembly into displacement in the vertical direction, the displacement finally acts on the third-stage amplifying assembly, and the third-stage amplifying assembly reduces the final output displacement coupling error.

Description

technical field [0001] The invention relates to the technical field of piezoelectric ceramic driving precision instruments, in particular to a two-dimensional large-stroke high-load decoupling deflection device. Background technique [0002] The flexible hinge amplifying mechanism used in the existing tilting table only uses the principle of multi-level leverage on one side without considering the aspect of high load, and the displacement output by the single-sided flexible hinge amplifying structure will also produce components in other directions. Coupling occurs during the process, which affects the angular accuracy of the deflection. When the displacement disappears, the tilt table needs to return to the initial state. Two identical structures are placed in the same direction or the spring restores the initial state. For the two-dimensional tilt table, it is placed symmetrically in the same dimension, not only by the reaction force from the same direction , at the same ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a two-dimensional large-stroke high-load decoupling yaw device to solve the problem in the prior art that coupling occurs during the work of the yaw table and affects the angle of yaw

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