Array substrate manufacturing method, array substrate and display panel
A technology of an array substrate and a manufacturing method, applied in the display field, can solve the problems of cracked protective layer, rough particles, liquid crystal bubbles, etc., and achieve the effect of improving smoothness
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[0049] refer to Figure 4 , Figure 4 As the first embodiment of the manufacturing method of the array substrate of the present invention, the manufacturing method of the array substrate includes the following steps:
[0050] Step S10, coating a first protective layer on the thin film transistor substrate;
[0051] Optionally, the first protection layer may be silicon nitride material.
[0052] Step S20, forming a color resist layer on the first protective layer;
[0053] The thin film transistor substrate and the color resist layer are in a vacuum state;
[0054] Step S30, applying an alternating electric field with preset electric field parameters above the color-resist layer to eliminate particles on the surface of the color-resist layer;
[0055] The alternating electric field is generated by a radio frequency power supply; the color-resisting layer is the color-resisting layer, and the particles on the surface of the color-resisting layer include hydrocarbon-containin...
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