Movable temperature control sand bath beam source furnace and mounting and coating method thereof

Abstract

The invention provides a movable temperature control sand bath beam source furnace and a mounting and coating method thereof. Heat transfer can be faster and temperature control can be more accurate and faster by filling sand, and the structural design is movable, so that the use compatibility and universality in different vacuum cavities are facilitated. According to the movable temperature control sand bath beam source furnace, heating is achieved in a sand bath heating mode by the filling sand, the heat transfer mode is changed into two heat transfer modes including heat conduction and heat radiation from single heat radiation, heat transfer is faster, and temperature control is more accurate and faster; meanwhile, the movable temperature control sand bath beam source furnace has the characteristics of being simple in structure and movable, the position of the beam source furnace in a vacuum evaporation cavity and the position of the beam source furnace relative to a sample can be easily adjusted, and wide compatibility of the beam source furnace to vacuum evaporation cavities of different structures is also easily achieved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a movable temperature-controlled sand bath beam source furnace and its installation and coating methods. Background technique [0002] In the evaporation coating equipment, the beam source furnace is an important part of its interior. It is usually required that during the working process of the beam source furnace, the temperature is accurately and controllable, and the distance between the sample and the sample deposited by thermal vacuum evaporation can be adjusted, and no impurity gas will be generated to pollute the cavity and the evaporated sample. Existing thermal evaporation beam source furnaces mostly use resistance wires or lamp tubes to heat the crucible. Since there is no contact, the heat transfer mode between the heat source and the crucible is only thermal radiation, which is not conducive to precise temperature control. If the heating wire is in contact wi...

AI Technical Summary

Problems solved by technology

The existing thermal evaporation beam source furnace mostly uses resistance wire or lamp tube to heat the crucible. Since there is no contact, the heat transfer mode between the heat source and the crucible is only thermal radiation, which is not conducive to precise temperature control.

If the heating wire is in contact with the crucible, it may cause uneven heating and affect the effective use of the drug

In addition, in order to improve the integration level of the existing thermal evaporation beam source furnace, it is usually required to use flanges to fix the entire beam source furnace on the vacuum chamber, resulting in strict requirements for the position and interface of the beam source furnace in the vacuum chamber, which is not conducive to different Compatibility and universality of vacuum chamber

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