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Automatic material conveying system and automatic material conveying method

A material conveying system and material conveying technology, applied in the field of material conveying, can solve the problems of not being able to know the congestion time of the overhead crane, the congestion information of the number of times of congestion, reducing the handling efficiency of the automatic material transmission system, and unable to display the congestion position of the overhead crane in real time. , to reduce the risk of traffic jams, improve congestion, and improve handling efficiency.

Active Publication Date: 2021-09-17
SHANGHAI HUALI MICROELECTRONICS CORP
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Problems solved by technology

[0003] The existing AMHS can only monitor the real-time running position of the overhead trains, but when the overhead trains are congested, the AMHS cannot display the specific congestion location of the overhead trains in real time, and cannot obtain congestion information such as the congestion time and the number of congestions of the overhead trains. As a result, the utilization rate of the loading port of each machine will be reduced, the handling efficiency of the crane between the machines will be reduced, and the handling efficiency of the entire automatic material transmission system will be reduced.

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  • Automatic material conveying system and automatic material conveying method
  • Automatic material conveying system and automatic material conveying method

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[0037] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0038] figure 1 It is a structural principle block diagram of the automatic material conveying system in a preferred embodiment of the present invention. Such as figure 1 As shown, the present invention provides an automatic material transfer system (abbreviated as AMHS), which includes a crane 101, a terminal device 102, a machine 103 and an automatic transfer track. The machine 103 is used to process wafers (not shown), and there are usually multiple machines 103 that can perform different processing on wafers, b...

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Abstract

The invention provides an automatic material conveying system and an automatic material conveying method. The automatic material conveying system comprises machine tables, terminal equipment, a plurality of crown blocks and an automatic carrying track, wherein the crown blocks are used for running on the automatic carrying track, the terminal equipment is used for controlling automatic machining of wafers, each crown block can send the position information of the crown block to the terminal equipment, and the terminal equipment can obtain the congestion state of the crown block according to the position information sent by each crown block. The carrying efficiency of the crown blocks among the machine tables can be improved, and the utilization rate of loading ports of the machine tables can be improved, so that the carrying efficiency of materials can be improved, the congestion risk of the crown blocks is reduced, and the productivity is improved.

Description

technical field [0001] The invention relates to the technical field of material conveying, in particular to an automatic material conveying system and an automatic material conveying method. Background technique [0002] In the field of semiconductor manufacturing, the Automatic Material Handling System (AMHS for short) is more convenient to use. AMHS usually uses cranes to transfer wafers between machines. If the processing tasks of some machines are not completed, the wafers to be processed need to be sent to the temporary wafer storage area to wait for the wafers being processed. After the processing is completed, the wafers to be processed are transported between the machine and the wafer temporary storage area by the crane. Congestion often occurs during the transportation process of AMHS. In order to solve the above congestion problem, AMHS usually needs to obtain the congestion situation of each sky train and improve and optimize it, so as to ensure that each sky tra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G63/00B65G49/07H01L21/67H01L21/677
CPCB65G63/002B65G49/07H01L21/67733H01L21/67276Y02P90/02
Inventor 陈力钧戴骁超桂纯钦杨磊
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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