Bulk acoustic wave resonator and manufacturing method thereof
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[0042] The application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain related inventions, rather than to limit the invention. It should also be noted that, for the convenience of description, only the parts related to the related invention are shown in the drawings.
[0043] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and embodiments.
[0044] Figure 1a -b shows a schematic diagram of the release of the sacrificial layer of the BAW resonator in the prior art. like Figure 1a and 1b As shown, the cavity of the bulk acoustic wave resonator of this structure and the release channel are in the same plane, bec...
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