Interpolation mechanism for laser scribing device and scribing device using the interpolation mechanism
A scribing device and interpolation technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problems of high price and lack of compatibility of electronic scanners
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[0030] Next, an embodiment of the present invention will be described in more detail with reference to the drawings.
[0031] figure 1 It is a plan view for explaining the purpose and principle of laser beam irradiation position interpolation.
[0032] The basic purpose of performing interpolation is to form scribe lines at accurate positions on the brittle substrate 100 . That is, if figure 1 As shown, even if the first belt conveyor 13 moves horizontally in the Y direction and the brittle substrate 100 located at the lower part of the horizontal moving table 17 is in a skewed state, considering the degree of skewing, the light beam emitting part that moves in the X direction is also simultaneously Move in the Y direction.
[0033] Regarding this interpolation, the amount of deviation ΔY (in the Y direction along the X direction) between the virtual straight line 100a connecting the alignment mark 100e and the moving route 100b of the laser irradiation unit 30 itself is ca...
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Abstract
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