An Infrared Color Focal Plane Detector In Situ Integrated Metasurface Phased Array

A technology of focal plane detectors and phased arrays, which can be used in electric radiation detectors, radiation control devices, and climate sustainability. It can solve problems such as crosstalk and light secondary reflection signals, and reduce signal crosstalk and signal sensitivity. High, the effect of avoiding diffraction phenomenon

Active Publication Date: 2022-02-18
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention proposes an infrared color focal plane detector with an in-situ integrated metasurface phased array, which solves the signal crosstalk problem caused by the secondary reflection of light caused by the gap layer between the metasurface array and the planar structure infrared detector in the original structure , while improving the integration of the device

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  • An Infrared Color Focal Plane Detector In Situ Integrated Metasurface Phased Array
  • An Infrared Color Focal Plane Detector In Situ Integrated Metasurface Phased Array

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Embodiment 1

[0022] figure 1 It shows that when the region corresponding to the metasurface phased array 1 directly above the first sub-pixel 2-1 and the third sub-pixel 2-3 in the superpixel unit has no light-shielding layer, the in-situ integrated metasurface phased array Schematic cross-section of an infrared color focal plane detector.

[0023] like figure 1 As shown, the structure diagram of the in-situ integrated metasurface phased array infrared focal plane detector provided by the example of the present invention includes a metasurface phased array 1 and an infrared monochromatic focal plane detector 2 . The metasurface phased array 1 is composed of a metasurface phased array substrate 1-2 and a surface micro-nano structure 1-1 prepared on the metasurface phased array substrate 1-2. The metasurface phased array substrate 1-2 is in-situ integrated on the substrate of the infrared monochromatic focal plane detector 2 by a deposition process. Infrared monochromatic focal plane dete...

Embodiment 2

[0029] figure 2 It shows that when there is a light shielding layer in the region corresponding to the metasurface phased array 1 directly above the first sub-pixel 2-1 and the third sub-pixel 2-3 in the superpixel unit, the in-situ integration of the metasurface phased array Schematic cross-section of an infrared color focal plane detector.

[0030] like figure 2 As shown, the structure diagram of the in-situ integrated metasurface phased array infrared focal plane detector provided by the example of the present invention includes a metasurface phased array 1 and an infrared monochromatic focal plane detector 2 . The metasurface phased array 1 is composed of a metasurface phased array substrate 1-2, a surface micro-nano structure 1-1 and a light shielding layer 1-3 prepared on the metasurface phased array substrate 1-2. The metasurface phased array substrate 1-2 is in-situ integrated on the substrate of the infrared monochromatic focal plane detector 2 by a deposition pro...

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Abstract

The invention discloses an infrared color focal plane detector with an in-situ integrated metasurface phased array. By in-situ integrating a metasurface phased array on an infrared monochromatic focal plane detector substrate, the wide-spectrum infrared light Refraction occurs after passing through the metasurface phased array, and the refraction angle corresponds to the wavelength of the light one by one, and then enters the corresponding sub-pixel position of the infrared monochromatic focal plane detector, the first sub-pixel and the second sub-pixel The third and third sub-pixels respectively receive different signals, the super-pixel unit outputs unit signals, and a color image is obtained by using an image synthesis method. The detector has the advantages of small signal crosstalk, simple structure, high integration, and uses metasurface phased arrays and infrared monochromatic focal plane detectors to generate infrared color images.

Description

technical field [0001] The invention relates to an infrared focal plane detection technology and a metasurface phase control technology, in particular to a metasurface phased array design technology and a design and preparation technology of an infrared focal plane detector. Background technique [0002] The multi-band infrared detector has broad application prospects. It can detect infrared light signals in multiple spectral bands, realize infrared color imaging through interpolation, comparison and other methods, and obtain more detailed features of the target. [0003] In the original infrared color detector, the metasurface array structure is placed above the planar structure infrared detector, see the invention patent: an infrared color detector based on metasurface (application number: CN202010965538.1). In the disclosed structure, there is a gap between the planar structure infrared detector and the metasurface array structure. When the refracted light enters the plan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/144G01J5/10
CPCH01L27/144G01J5/10Y02P70/50
Inventor 叶振华王进东叶文成廖清君崔爱梁张伟婷丁瑞军何力
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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