Precise air floating platform

Abstract

The invention relates to a precise air floating platform, and belongs to the technical field of transportation devices. The air floating platform comprises one or more parallel supporting surfaces, and each supporting surface comprises a positive pressure unit and a negative pressure unit; the positive pressure units comprise pressure outlets, and the pressure outlets provide pressurized gas and are used for generating supporting gas films for supporting a borne object; the negative pressure units comprise pressure inlets, and the pressure inlets provide a pressure value smaller than the environment pressure value and generate adsorption pressure opposite to the supporting gas films; and an atmosphere communicating groove surrounds the periphery of each positive pressure unit and the periphery of each negative pressure unit, and the atmosphere communicating grooves locally discharge the mass flow of the pressure outlets or locally provide the mass flow of the pressure inlets, so that the pressure at the atmosphere communicating grooves is kept as the environment pressure. By adopting the technical scheme, a thin flexible object can be stably, reliably and contactlessly suspended on the air floating platform, and low-friction, high-precision, lossless and efficient supporting, transportation, detection and processing treatment are realized.

Description

technical field [0001] The invention belongs to the technical field of transportation devices, and in particular relates to a precision air-floating platform. Background technique [0002] Transportation devices include traditional contact transportation and non-contact transportation. Among them, there are many problems in traditional contact transportation, such as: mechanical damage, contact pollution, ESD, contact deformation, temperature gradient, etc. At the same time, as the size of transported objects becomes larger and thinner (such as silicon wafers, LCD glass substrates, FPDs, etc.), the requirements for the stability, reliability and processing precision of their transportation are getting higher and higher, so as to achieve non-destructive and reliable , Efficient transportation and detection difficulty increase step by step. Traditional contact transportation can no longer meet the application requirements of increasingly developing technologies such as preci...

AI Technical Summary

Problems solved by technology

According to the research results of this paper, it can be seen that after increasing the vacuum degree inside the air flotation platform, the peak value of negative pressure at the pressure inlet of the internal area increases, and the peak value of positive pressure at the pressure outlet decreases slightly, so that the peak value of the high and low pressure of the air cushion tends to be slightly uniform, but the structure The pressure peak value of the pressure outlet / pressure inlet at different positions with the same properties is still quite different. The overall bending stiffness of the thin flexible object is extremely low, and the uneven load can easily cause the overall large deformation of the object and the unevenness of the air cushion.

The optimization measures of the pressure zoning have limited improvement on the uniformity and locality of the pressure blocking and air cushion, while the cost of the pressure zoning is greatly increased

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