Piezoelectric-piezoresistive flexible sensor for dynamic and static cooperative detection and preparation method thereof

Abstract

The invention provides a piezoelectric-piezoresistive flexible sensor for dynamic and static cooperative detection and a preparation method thereof, the piezoelectric-piezoresistive flexible sensor comprises a piezoelectric unit for collecting multi-point dynamic piezoelectric signals and a piezoresistive unit for collecting static or low-frequency piezoresistive signals, the piezoelectric unit comprises a first electrode array layer, a piezoelectric sensitive layer and a second common electrode layer; the piezoresistive unit comprises a piezoresistive sensitive layer, an upper packaging layer, a lower packaging layer, a first electrode and a second electrode, whereinthe first electrode and the second electrode are symmetrically arranged on the two sides of the piezoresistive sensitive layer; and the lower surface of the second common electrode layer of the piezoelectric unit is bonded with the upper surface of the upper packaging layer of the piezoresistive unit, so that the piezoelectric unit and the piezoresistive unit are bonded into an integral structure. Piezoelectric and piezoresistive effects are unified in a single device, sensitivity of a piezoelectric unit to high-dynamic pressure behaviors and applicability of a piezoresistive unit to static and low-frequency pressure behaviors are utilized, and a single flexible touch sensor can be simultaneously used in the field of dynamic and static cooperative detection through real-time signal grabbing and analysis.

Description

technical field [0001] The invention relates to the field of flexible tactile sensors, in particular to a piezoelectric-piezoresistive dual mechanism flexible sensor for dynamic and static cooperative detection. Background technique [0002] With the popularity of smart terminals, flexible electronic devices are booming due to their potential in the fields of human-computer interaction and soft robotics. market prospects. The tactile sensor imitates the tactile perception function of the human skin. Through the mutual contact between the sensor and the measured object, or the specific deformation of the sensor itself, the perception of the physical properties of the measured object or the monitoring of the action behavior of the applicator itself is completed. [0003] In terms of mechanism of action, the most widely studied and applied flexible tactile sensors are piezoelectric and piezoresistive sensors. Piezoelectric tactile sensors rely on the piezoelectric effect. In ...

AI Technical Summary

Problems solved by technology

However, limited by a single mechanism, piezoelectric tactile sensors are usually unable to achieve static measurements and have relatively poor sensitivity and reliability at low frequencies

In contrast, flexible piezoresistive tactile sensors usually have poor dynamic response

Therefore, it is difficult for these two types of sensors to meet the requirements of a single flexible pressure sensor to achieve high dynamic and static detection capabilities in the full frequency range. Detection accuracy is also an important problem and challenge in this field

[0005] After searching the existing technical documents and patents, it is found that the Chinese patent application number is 202011035525.0, which discloses a piezoresistive composite tactile sensor. The sensor also includes a piezoelectric layer and a piezoresistive layer. However, the piezoelectric layer Both the upper and lower electrodes are surface electrodes, which cannot realize multi-point array detection. Another disadvantage is that the electrodes of the piezoresistive layer are designed to be arranged in an upper and lower structure. , on the other hand, when the upper and lower electrodes are deposited, due to the structural defect of the porous piezoresistive sensitive layer, it is easy to cause the upper and lower electrodes to conduct, resulting in device failure

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