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Terahertz microfluidic sensor with metal square resonance array

A terahertz and sensor technology, applied in the field of terahertz microfluidic sensors, can solve the problems of high Q value and high sensitivity that cannot meet actual needs, and achieve the effect of improving Q value and detection sensitivity

Active Publication Date: 2021-06-29
SOUTHWEAT UNIV OF SCI & TECH +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, most of the existing terahertz metamaterial biosensors still cannot meet the practical needs in terms of high Q value and high sensitivity.

Method used

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  • Terahertz microfluidic sensor with metal square resonance array
  • Terahertz microfluidic sensor with metal square resonance array
  • Terahertz microfluidic sensor with metal square resonance array

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Embodiment

[0050] like figure 2 , image 3 and Figure 4 As shown, the thickness m of the cover layer 1 is 50 μm, the thickness n of the metal rectangular resonant array 2 is 0.2 μm, the height q of the microfluidic channel 5 is 10 μm, the side length p of the square unit period is 120 μm, and the inner and outer rings The width w is 6 μm, the length a of the first resonant portion is 15 μm, the length b of the second resonant portion is 4 μm, the length c of the third resonant portion is 74 μm, the length d of the fourth resonant portion is 31 μm, and the length of the fifth resonant portion The length e of the sixth resonant portion is 90 μm, the length f of the sixth resonant portion is 52 μm, and the length g of the seventh resonant portion is 39 μm.

[0051] The distance h between the first resonance part and the third resonance part is 4 μm, the distance i between the first resonance part and the fourth resonance part is 5 μm, and the distance j between the first resonance part ...

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Abstract

The invention discloses a terahertz microfluidic sensor with a metal square resonance array. The terahertz microfluidic sensor comprises a cover layer, a metal rectangular resonance array, a metal reflecting mirror surface and a substrate, wherein the metal reflecting mirror surface is arranged on the surface of the substrate; the metal reflecting mirror surface and the cover layer are oppositely arranged, and a gap between the metal reflecting mirror surface and the cover layer forms a microfluidic channel; and the metal rectangular resonance array is arranged in the microfluidic channel and located on the surface of the cover layer. The metal rectangular resonant array is composed of a plurality of metal rectangular resonant units, each metal rectangular resonant ring unit comprises two same metal rectangular resonant rings, and the metal rectangular resonant rings are spirally wound; outer rings of the two metal rectangular resonant rings are connected; and the two metal rectangular resonant rings are rotationally symmetrical. The microfluidic channel is used for reducing the strong absorption effect of moisture on terahertz waves, and the metal square resonance array is located in the microfluidic channel, so that the contact area between liquid to be detected and the metal square resonance array is increased, and the Q value and the detection sensitivity of the sensor are improved.

Description

technical field [0001] The invention relates to the technical field of microflow sensors, in particular to a terahertz microflow sensor with a metal square resonant array. Background technique [0002] Terahertz waves refer to electromagnetic waves with a frequency in the range of 0.1 to 10 THz, between microwave and infrared, and have both the fingerprint recognition characteristics of infrared and the characteristics of microwave communication. Compared with electromagnetic waves in other frequency bands, terahertz waves have many unique advantages. As far as biosensing is concerned, terahertz photons have low energy and are not easy to cause damage to biological substances. In addition, the frequency of vibration or rotational energy of biomacromolecules is exactly in the terahertz band. When organic molecules interact, they will show strong absorption and dispersion characteristics in the terahertz band. Therefore, terahertz waves play an important role in biomedicine ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/3581
CPCG01N21/3581
Inventor 邓琥王民昌尚丽平康莹杨洁萍武志翔熊亮刘泉澄屈薇薇李占锋何俊
Owner SOUTHWEAT UNIV OF SCI & TECH
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