Thin film packaging structure and preparation method thereof, and display panel
A thin-film packaging and substrate technology, which is used in semiconductor/solid-state device manufacturing, electrical components, and electrical solid-state devices, etc., can solve problems such as intrusion and packaging failure, and achieve the effects of easy operation, improved packaging performance, and simple methods.
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[0055] In order to obtain the above thin film encapsulation structure, the embodiment of the present application also provides a preparation method of the thin film encapsulation structure, the preparation method of the thin film encapsulation structure includes the following steps of preparing an inorganic layer:
[0056] S01, performing film-forming treatment on the inorganic slurry to obtain an inorganic layer;
[0057] Wherein, the inorganic slurry includes a water-swellable material or a precursor for forming the water-swellable material, and the water-swellable material includes at least one of sodium bentonite, nano-scale silica gel, and ettringite.
[0058] In the preparation method of the thin film encapsulation structure provided in the embodiment of the present application, the inorganic slurry including the water-absorbing swellable material or the precursor used to form the water-absorbing swellable material is subjected to film-forming treatment, so as to obtain a...
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