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Two-dimensional full-Stokes polarization imaging element and preparation method thereof

A polarization imaging and component technology, applied in polarization components, optical components, instruments, etc., can solve the problems of small extinction ratio, complex process, low transmittance, etc., and achieve the effect of simple steps, mature technology and high transmittance

Inactive Publication Date: 2021-06-01
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
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Problems solved by technology

The structure of these circular polarization detection units is a complex three-dimensional structure, the process is complicated, the cost is expensive, and the extinction ratio is small and the transmittance is low.

Method used

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  • Two-dimensional full-Stokes polarization imaging element and preparation method thereof
  • Two-dimensional full-Stokes polarization imaging element and preparation method thereof
  • Two-dimensional full-Stokes polarization imaging element and preparation method thereof

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Embodiment 1

[0031] See figure 1 所示,本发明全斯托克斯偏振成像元件包括:1、透光基底;2、设置于透光基底上的四个不同方向的光栅介质结构;3、两个旋转对称手性介质结构。

[0032] 所述透光基底材料为二氧化硅,介质结构的材料为硅。

[0033] 所述的光栅结构俯视图如 figure 2 所示,周期0.77μm;介质结构的占空比0.88,所述的旋转对称手性介质结构的深度H为0.215μm。

[0034] 所述的手性对称结构俯视图如 image 3 所示,周期0.92μm;所述的旋转对称手性介质结构的深度H为0.215μm,圆心距L为0.36μm,半径R 为0.23μm。

[0035] 该元件通过如下步骤制得:

[0036] (1)在二氧化硅表面利用电子束蒸发或者化学气相沉积法生长出一层硅;

[0037] (2)在硅层上使用匀胶机涂上一层电子束光刻胶负胶;

[0038] (3)利用电子束曝光和显影技术根据特定参数得到0°、45°、90°和135°不同取向的线栅和左右旋旋转对称手性结构的光刻胶结构图形;

[0039] (4)使用反应离子束刻蚀工艺刻蚀硅层,去除残余光刻胶得到全斯托克斯偏振成像元件。

[0040] attached Figure 4 , attached Figure 5 And attached Image 6 分别为线偏振光(TE,TM)由基底入射到介质线栅结构后的透过率曲线图、消光比曲线图以及二色性,其中 TE偏振光平行于光栅方向。在1.54μm波段,此元件对TM偏振光透过率达到92.5%。对两种偏振光的消光比达33.57db,偏振二色性超过92%。

[0041] attached Figure 7 , attached Figure 8 And attached Figure 9 分别为左右旋圆偏振光(RCP,LCP)由基底入射到附 image 3 所示的旋转对称手性结构后的透过率曲线图、圆偏振消光比以及圆偏振二色性曲线图。可以看出,在1.54μm波段此元件的对左旋圆偏振光的透过率达到95%。消光比达到45比1,偏振二色性达到94.3%。

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Abstract

A two-dimensional full-Stokes polarization imaging element belongs to an optical device, and can be used for realizing real-time polarization imaging. The element is composed of a light-transmitting substrate and a rotational symmetric medium structure layer located on the light-transmitting substrate. The medium structure layer is composed of four linear gratings with different orientations and two symmetrical structure arrays with different rotation directions. The element can be manufactured through the electron beam exposure and development technology, the ion beam etching technology and other technological processes. The full-Stokes polarization imaging element is excellent in performance, in the band of 1.54 microns, the transmittance of linear polarized light can exceed 92.5%, and the extinction ratio reaches 33.57 db; and the circular polarization dichroism exceeds 92%. For circularly polarized light, the polarization transmittance is greater than 95%, the circular polarization dichroism reaches 94.3%, and the extinction ratio is greater than 45: 1. Meanwhile, the structure is simple, the performance is excellent, manufacturing is easy, and the high application value is achieved in the fields of optical sensing, optical imaging and the like.

Description

technical field [0001] 本发明涉及偏振光学元件,具体涉及一种全斯托克斯偏振成像元件及其制备方法。 Background technique [0002] 偏振成像技术是光学领域的一种新技术,光的偏振特性能够提供目标的光强图像无法显示的表面粗糙度、纹理走向、表面取向、表面电导率、材料理化特征、含水量等特征,对物体轮廓和表面去向识别具有明显的优越性,偏振成像技术在大气、自然地物、人工目标、医学诊断以及天文学探测领域具有广泛应用。例如:对隐藏或伪装目标探测;对不同物质检测;模糊轮廓(指纹、碑文等)识别;烟雾环境去雾成像;进行癌症、烧伤等医学诊断;用于星载或机载遥感等。偏振成像技术与现有的成像系统相比,增加了对光线的各个偏振分量进行测量,然后的得到Stokes矢量图或Mueller图,进而进行分析计算得到更多的特征信息。 [0003] 偏振成像技术中,重要的步骤是获取不同偏振方向的信息。现有的焦平面偏振相机通过ccd相机的像素做一层偏振器件,可以同时获得物体不同偏振方向上的偏振信息,实现实时偏振成像,但是现存的相机仅能够探测线偏振矢量,无法对圆偏振分量进行有效的探测。在偏振光成像中,圆偏振光在大颗粒散射介质中具有独特的优势,如在水底、烟雾、云层以及生物组织中圆偏振光的成像质量要优于线偏振光。因此增加对圆偏振光的获取可以提高雾霾、云雾等恶劣天气环境中的穿透性。 [0004] 随着含表面等离子波的亚波长结构器件与技术的发展,许多课题组在利用纳米微结构区分左右旋圆偏振光方面做了大量的研究工作。例如公开号为CN101852884B和CN101782666B专利文献通过在介质基地上放置周期性的双螺旋状和螺旋状金属线来实现对左旋和右旋圆偏振光的选择性透过。这些圆偏振检测单元结构为复杂的三维结构,工艺复杂,成本昂贵,并且消光比小透过率低。 Contents of the invention [0005] 本发明为一种二维全斯托克斯偏振成像元件,可以实现实时偏振成像,并且性能优良,透过率高、加工简单,制备工艺成熟,适合批量加工制备,具有很高的商业化应用 prospect. In order to achieve the above-mentioned purpose of the invention, the techni...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/30
CPCG02B5/3058
Inventor 董延更胡敬佩张冲曾爱军黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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