Spatial resolution pressure intensity measurement system and method based on vacuum holographic optical tweezers

Abstract

The invention discloses a spatial resolution pressure measurement system and method based on vacuum holographic optical tweezers. The system comprises a vacuum cavity, micro-nano particles, an optical tweezers device, a feedback cooling device, a driving electric field device, a spatial light modulator, a polarization control and detection device and a residual gas analyzer, laser is emitted from a laser source, enters a first polarizing beam splitter through the first beam splitter to be transmitted, is reflected and modulated by the spatial light modulator and is transmitted and converged by a first convex lens to form captured light, and captured light irradiates the micro-nano particles to form a light trap capturing area; the captured light passes through the micro-nano particles, is transmitted and converged by a second convex lens and then enters a second polarizing beam splitter to be reflected and transmitted, and a light beam reflected by the second polarizing beam splitter enters a first photodiode; and six electrodes are arranged around the light trap capture region. According to the invention, the control flexibility of the holographic optical tweezers is utilized, and the local detection means of the micro-nano particles is combined, so that the pressure distribution measurement of the micro-nano scale spatial resolution under high vacuum can be realized.

Description

technical field [0001] The invention relates to an instrument and method for measuring the spatial distribution of micro-nano-scale local pressure, belonging to the technical field of precision measurement, in particular to a space-resolution pressure measurement system and method based on vacuum holographic optical tweezers. Background technique [0002] A vacuum gauge is an instrument that measures vacuum or pressure. There are a wide range of applications in scientific research and industrial fields. Traditional vacuum measurement methods include ionization vacuum gauges, capacitive film vacuum gauges, magnetic levitation rotor vacuum gauges, etc., and their principles and calibration methods are different. For example, the ionization vacuum gauge ionizes the gas molecules by strengthening the electric field, and then measures the conductivity. The electrical conductivity depends on the density of the ionized gas molecules around, so that the pressure can be deduced; th...

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Problems solved by technology

[0006] Traditional pressure measurement methods are difficult to measure the pressure distribution with micro-nano scale spatial resolution, especially in high vacuum

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