Machine tool dynamic contour error compensation device and method

Abstract

The invention provides a machine tool dynamic contour error compensation device and method, and belongs to the field of ultra-precision. The method comprises the steps of detecting the position of a machine tool in the direction z in real time, and converting the position information into a two-channel differential signal; converting the two-channel differential signal into two square signals; distinguishing the direction according to the phase difference of the two square signals, and counting pulses; after converting the count value into analog voltage, subtracting set standard voltage from the analog voltage to obtain an inertia vibration error; and amplifying the inertia vibration error and then taking the inertia vibration error as a control instruction, wherein the control instruction is control voltage. The control voltage is converted into mechanical energy, a sharp knife servo system drives a tool to vibrate, and therefore, the inertia vibrating error is compensated. By means of the machine tool dynamic contour error, the dynamic contour error on a workpiece is avoided, and the workpiece processing precision of the workpiece are greatly improved.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining, and more specifically relates to a compensation device and method for dynamic contour errors of machine tools. Background technique [0002] Ultra-precision machining of surface microstructures and complex optical surfaces requires ultra-precision machine tools for extremely precise motion control. In the process of micro / nano processing, in order to meet the requirements of geometric accuracy, it is necessary to alleviate the influence of ultra-precision machine tools, usually need to be installed, however, a major disadvantage of passive vibration isolators is the low stiffness, which is difficult to support the inertial force of each axis in motion , the table is supported by this vibration isolator which is equivalent to a soft spring. When the machine tool table accelerates or decelerates during motion, the inertial force of the machine tool table excites vibrations in the machine t...

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Problems solved by technology

[0006] Aiming at the defects of the prior art, the object of the present invention is to provide a compensation device and method for the dynamic contour error of the machine tool, aiming at solving the relative motion caused by the tracking error between the cutting tool and the workpiece in the existing rocking vibration, resulting in Dynamic contour errors are generated on the workpiece, which in turn worsens the problem of the workpiece machined surface

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