Lithium niobate film electro-optical modulator chip and modulator
An electro-optic modulator, lithium niobate technology, applied in the direction of instruments, optics, nonlinear optics, etc., can solve the problems of low electro-optic modulation efficiency, long total device length, increase the total device length, etc., achieve high electro-optic modulation efficiency, small Effect of waveguide mode distribution and overall length reduction
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Embodiment 1
[0045] Such as image 3 , Figure 4 As shown, the lithium niobate thin film electro-optic modulator chip includes: base wafer 1-1, adhesive layer film 1-2, lithium niobate thin film substrate 1-3, input end optical waveguide 1-4-1, 90° curved waveguide 1-4-2, Y branch waveguide 1-4-3, optical waveguide in radio frequency modulation area 1-4-4, optical waveguide in the first bias control area 1-4-5A, optical waveguide in the second bias control area 1-4-5B, output optical waveguide 1-4-6, radio frequency modulation electrode 1-5-1, radio frequency modulation electrode 2 1-5-2, ground electrode 1-6, bias control electrode 1-7 -1. Bias control electrode two 1-7-2, bias control electrode three 1-7-3, buffer layer film 1-8.
[0046] The base wafer 1-1 provides mechanical support for the lithium niobate thin film substrate 2, and its constituent materials can be any one of lithium niobate, lithium tantalate, silicon, quartz, sapphire, etc., preferably silicon is used as the materi...
Embodiment 2
[0072] This embodiment is an improvement carried out on the basis of Embodiment 1, as Figure 5 As shown, a lithium niobate thin film electro-optic modulator in this embodiment includes: a lithium niobate thin film electro-optic modulator chip, an optical fiber crystal carrier block 2, an optical fiber 3, a microstrip circuit ceramic plate 4, a matching resistor 5, and lead pins 6. Radio frequency connector 7, bonding gold wire 8, packaging tube shell 9.
[0073] The lithium niobate thin film electro-optic modulator chip has the structure of the lithium niobate thin film electro-optic modulator chip in Embodiment 1.
[0074] The optical fiber crystal carrier block 2 can be selected from one of materials such as lithium niobate, lithium tantalate, glass, quartz, silicon, etc., and there are grooves in the shape of round holes, square grooves, semicircular grooves, and V-shaped grooves on it. for placing fibers. The optical fiber 3 is a single-mode non-polarization-maintaining...
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