Substrate frame for ARC coating production line
A technology of coating production line and substrate holder, which is applied in sputtering coating, ion implantation coating, gaseous chemical coating, etc., can solve the problems of high probability of shaking, damage, long production line, etc.
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[0020] The substrate frame used in the ARC coating production line provided by the present invention will be further described in detail and completely below in conjunction with the embodiments. The embodiments described below are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0021] Substrate holders for ARC coating lines, such as Figure 1 ~ Figure 4 As shown, it is used to load the substrate to be coated, and the substrate rack runs on the coating production line. Comprising a substrate holder body 1, a frame assembly and a cover assembly, the frame assembly is connected to each side of the substrate holder body 1, the substrate holder body 1 is provided with a substrate area, and the substrate area includes a first substrate area, a second substrate area independent of each other The second substrate area 6 and the third substrate area 7, the cover plate assembly includes a first cover plate 8, a second...
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