Automatic monitoring system and method for defect scanning machine

An automatic monitoring system and defect scanning technology, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of unable to monitor defect scanning machines, achieve the effect of reducing the affected area and improving the coverage rate

Pending Publication Date: 2021-04-16
SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide an automatic monitoring system and method for defect scanning machines, which can solve the problem that the existing technology cannot monitor defect scanning machines

Method used

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  • Automatic monitoring system and method for defect scanning machine

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Embodiment Construction

[0028] Embodiments of the present invention are described below through specific examples, and those skilled in the art can fully understand other advantages and technical effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through different specific implementation modes, and various details in this specification can also be applied based on different viewpoints, and various modifications or changes can be made without departing from the general design idea of ​​the invention. It should be noted that, in the case of no conflict, the following embodiments and features in the embodiments can be combined with each other. The following exemplary embodiments of the invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. It should be understood that these embodiments are provided to make the disclosure of the present i...

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Abstract

The invention discloses an automatic monitoring method and an automatic monitoring system for a defect scanning machine, which are used for monitoring all defect scanning machines for online defect scanning. The method comprise the following steps of: acquiring defect scanning information of all defect scanning machines; obtaining a query condition set by a user, and monitoring the defect scanning information according to the query condition set by the user; screening out a defect scanning machine table corresponding to the defect scanning information meeting the query condition; counting and summarizing the screened defect scanning information, and determining the scanning rate information of the corresponding defect scanning machine; and judging the operation state of the defect scanning machine according to the scanning rate information, and determining whether to trigger an alarm according to the operation state of each defect scanning machine. According to the invention, full-coverage monitoring of the defect scanning machine can be realized, the scanning rate of the machine can be automatically counted, the machine with a potential risk problem can be conveniently found in time according to different scanning conditions, and early warning is carried out on the scanning condition of the machine.

Description

technical field [0001] The invention relates to semiconductor integrated circuit detection technology, in particular to an automatic monitoring system and method for a defect scanning machine. Background technique [0002] In recent years, with the rapid development of semiconductor integrated circuits and the scaling down of critical dimensions, their manufacturing processes have become more and more complex. At present, the advanced integrated circuit manufacturing process generally includes hundreds of process steps, and a small error in any one of the steps will cause problems for the entire semiconductor integrated circuit chip, and may even lead to the failure of the entire chip. Especially as the critical dimensions of the circuit continue to shrink, the requirements for process control are becoming more and more stringent. Therefore, in order to find and solve problems in a timely manner during the production process, it is generally necessary to perform online defec...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00G01R35/00
Inventor 郭明龚丹莉邵雄
Owner SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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