Magnetofluid integrated crystal oscillator baffle switching mechanism

Abstract

In order to solve the problems that a crystal oscillator piece in a crystal oscillator probe is repeatedly polluted, the crystal oscillator frequency is likely to be unstable, consequently the evaporation capacity of target materials cannot be accurately detected by the crystal oscillator probe, and the coating thickness of a substrate is not uniform, the invention provides a magnetofluid integrated crystal oscillator baffle switching mechanism. Magnetofluid is driven by an air cylinder to rotate, and the magnetofluid is rotated to drive a shielding plate to rotate, so that a shielding piece on the shielding plate is located under a detection hole of one unused crystal oscillator piece, and the frequency of repeated contamination of the crystal oscillator piece is reduced; the shielding piece is rotatably located at the lower end of the detection hole of the polluted crystal oscillator piece, and the unpolluted detection hole is used; the replacement efficiency of the crystal oscillator piece is reduced, and meanwhile the shielding plate is detachably connected with the magnetofluid after being polluted, thereby facilitating replacement; the sealing performance of an evaporator cavity is improved through use of the magnetofluid, and the structure is simple; and the operation is convenient, and the manufacturing cost is low.

Description

Technical field[0001]The present invention relates to the field of vapor deposition machines, and more particularly, to a magnetic fluid integrated crystal oscillator switching mechanism.Background technique[0002]The vacuum vapor deposition machine is under vacuum conditions, and the coating material (or weighing material) is evaporated by current heating, electron beam bombardment heating and ion source, and vaporizes, and then the gasified particles fly to the base. The surface is condensed, and finally the film is formed. Vacuum vapor deposition has the advantages of simple film formation method, high film purity and density, unique film structure and performance, and therefore a wide range of applications.[0003]In the process of vacuum vapor deposition, it is generally included in a crucible under the cavity, and is provided above the crucible to carry an umbrella shape of the coated workpiece, an umbrella fixture is fixed to coatings, including: steamed plating The chamber is p...

AI Technical Summary

Problems solved by technology

[0005] In view of this, in order to solve the problem that the crystal oscillator in the crystal oscillator is repeatedly polluted and the frequency of the crystal oscillator is unstable, resulting in the inability of the crystal oscillator to accurately detect the evaporation of the target, resulting in uneven coating thickness of the substrate , the present invention proposes a magnetic fluid integrated crystal oscillator baffle switching mechanism, which drives the magnetic fluid to rotate through the cylinder, and the rotation of the magnetic fluid drives the rotation of the shutter, so that the mask on the shutter is located in the detection hole of one of the unused crystal oscillators directly below the crystal oscillator to reduce the number of times of repeated contamination of the crystal oscillator. When the detection hole of the used crystal oscillator is repeatedly polluted, the mask rotates and is located directly below the detection hole of the contaminated crystal oscillator. Using the uncontaminated detection hole reduces the The replacement efficiency of the crystal oscillator is high. At the same time, after the shutter is contaminated, it is easy to replace due to the detachable connection with the magnetic fluid. The use of the magnetic fluid increases the sealing of the evaporation machine cavity. The structure is simple, the operation is convenient, and the manufacturing cost is low.

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